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1.发明申请公开(公告)号：US20070061042A1
公开(公告)日：2007-03-15
申请号：US11555240
申请日：2006-10-31
IPC分类号： G06F19/00
CPC分类号： B65G37/02 , B65G47/61 , B65G2201/0297 , H01L21/67769 , H01L21/67775 , H01L21/67778
摘要： In a first aspect, a substrate loading station is served by a conveyor which continuously transports substrate carriers. A substrate carrier handler that is part of the substrate loading station operates to exchange substrate carriers with the conveyor while the conveyor is in motion. A carrier exchange procedure may include moving an end effector of the substrate carrier handler at a velocity that substantially matches a velocity of the conveyor. Numerous other aspects are provided.
摘要翻译： 在第一方面中，基板装载站由连续输送基板载体的输送机供给。 作为基板装载站的一部分的基板载体处理器在输送机运动的同时与输送机交换基板载体。 载体交换过程可以包括以基本匹配输送机速度的速度移动基底载体处理器的端部执行器。 提供了许多其他方面。
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公开(公告)号：US20070059145A1
公开(公告)日：2007-03-15
申请号：US11554876
申请日：2006-10-31
IPC分类号： B65G47/90
CPC分类号： H01L21/67276 , H01L21/67769 , H01L21/67778
摘要： In a semiconductor fabrication facility, a conveyor transports substrate carriers. The substrate carriers are unloaded from the conveyor and loaded onto the conveyor without stopping the conveyor. A load and/or unload mechanism lifts the substrate carriers from the conveyor during unloading operations, while matching the horizontal speed of the conveyor. Similarly, during loading operations, the load/unload mechanism lowers a substrate carrier into engagement with the conveyor while matching the horizontal speed of the conveyor. Individual substrates, without carriers, may be similarly loaded and/or unloaded from a conveyor.
摘要翻译： 在半导体制造设备中，输送机输送基板载体。 基板载体从输送机卸载并装载到输送机上而不停止输送机。 在卸载操作期间，负载和/或卸载机构将基板载体从输送机提升，同时匹配输送机的水平速度。 类似地，在装载操作期间，装载/卸载机构降低了基板载体与输送机的接合，同时匹配输送机的水平速度。 没有载体的单个基底可以类似地从输送机装载和/或卸载。
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公开(公告)号：US20070056834A1
公开(公告)日：2007-03-15
申请号：US11554919
申请日：2006-10-31
IPC分类号： B65G17/02
CPC分类号： H01L21/67706 , B65G17/20 , B65G37/02 , B65G2201/0297 , H01L21/67727 , H01L21/6773 , H01L21/67769 , H01L21/67778 , Y10S414/135
摘要： According to a first aspect, a first conveyor system is provided that is adapted to deliver substrate carriers within a semiconductor device manufacturing facility. The first conveyor system includes a ribbon that forms a closed loop along at least a portion of the semiconductor device manufacturing facility. The ribbon is adapted to (1) be flexible in a horizontal plane and rigid in a vertical plane; and (2) transport a plurality of substrate carriers within at least a portion of the semiconductor device manufacturing facility. Numerous other aspects are provided, as are systems, methods and computer program products in accordance with these and other aspects.
摘要翻译： 根据第一方面，提供了一种适于在半导体器件制造设备内传送衬底载体的第一传送系统。 第一输送机系统包括沿半导体器件制造设备的至少一部分形成闭合回路的带状物。 该带适于（1）在水平面上具有柔性并且在垂直平面中是刚性的; 和（2）在所述半导体器件制造设备的至少一部分内传输多个衬底载体。 还提供了许多其他方面，以及根据这些和其它方面的系统，方法和计算机程序产品。
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4.发明申请公开(公告)号：US20070108020A1
公开(公告)日：2007-05-17
申请号：US11619183
申请日：2007-01-02
IPC分类号： B65G29/00
CPC分类号： H01L21/68707 , H01L21/6773 , H01L21/67733
摘要： A break-away mounting system for a continuous-motion, high-speed position conveyor system is disclosed. A support cradle may be suspended from a conveyor belt such that the support cradle maintains a fixed position and orientation relative to at least one point on the conveyor belt without inducing appreciable stress on the conveyor belt, the support cradle, or the coupling between the conveyor belt and the support cradle. The mount may include a leading rotatable bearing attached to the support cradle which may releasably engage a first key attached to the conveyor belt, the rotatable bearing adapted to accommodate rotational forces applied to the support cradle by the conveyor belt. The mount may also include a slide bearing attached to the support cradle which may releasably engage a second key attached to the conveyor belt, the slide bearing adapted to accommodate longitudinal forces applied to the support cradle by the conveyor belt.
摘要翻译： 公开了一种用于连续运动的高速位置输送机系统的分离安装系统。 支撑托架可以从传送带悬挂，使得支撑托架相对于传送带上的至少一个点保持固定的位置和方向，而不会在传送带，支撑架或传送带之间的联接中引起明显的应力 皮带和支撑架。 安装件可以包括附接到支撑架的前导可旋转轴承，其可释放地接合附接到传送带的第一键，该旋转轴承适于容纳由传送带施加到支撑支架的旋转力。 安装件还可以包括附接到支撑支架的滑动轴承，其可以可释放地接合附接到传送带的第二键，滑动轴承适于容纳由传送带施加到支撑支架的纵向力。
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公开(公告)号：US20060260916A1
公开(公告)日：2006-11-23
申请号：US11494904
申请日：2006-07-28
IPC分类号： B65G15/30
CPC分类号： H01L21/67706 , B65G17/20 , B65G37/02 , B65G2201/0297 , H01L21/67727 , H01L21/6773 , H01L21/67769 , H01L21/67778 , Y10S414/135
摘要： According to a first aspect, a first conveyor system is provided that is adapted to deliver substrate carriers within a semiconductor device manufacturing facility. The first conveyor system includes a ribbon that forms a closed loop along at least a portion of the semiconductor device manufacturing facility. The ribbon is adapted to (1) be flexible in a horizontal plane and rigid in a vertical plane; and (2) transport a plurality of substrate carriers within at least a portion of the semiconductor device manufacturing facility. Numerous other aspects are provided, as are systems, methods and computer program products in accordance with these and other aspects.
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公开(公告)号：US20060260910A1
公开(公告)日：2006-11-23
申请号：US11495055
申请日：2006-07-28
IPC分类号： B65G29/00
CPC分类号： H01L21/68707 , H01L21/6773 , H01L21/67733
摘要： A break-away mounting system for a continuous-motion, high-speed position conveyor system is disclosed. A support cradle may be suspended from a conveyor belt such that the support cradle maintains a fixed position and orientation relative to at least one point on the conveyor belt without inducing appreciable stress on the conveyor belt, the support cradle, or the coupling between the conveyor belt and the support cradle. The mount may include a leading rotatable bearing attached to the support cradle which may releasably engage a first key attached to the conveyor belt, the rotatable bearing adapted to accommodate rotational forces applied to the support cradle by the conveyor belt. The mount may also include a slide bearing attached to the support cradle which may releasably engage a second key attached to the conveyor belt, the slide bearing adapted to accommodate longitudinal forces applied to the support cradle by the conveyor belt.
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公开(公告)号：US20060072992A1
公开(公告)日：2006-04-06
申请号：US11210199
申请日：2005-08-23
IPC分类号： B65B69/00
CPC分类号： H01L21/67353 , H01L21/67373 , H01L21/67383 , H01L21/67386 , H01L21/67775 , H01L21/67778 , Y10S414/14
摘要： In a first aspect, an automatic door opener is provided that includes (1) a platform adapted to support a substrate carrier; (2) a door opening mechanism adapted to open a door of the substrate carrier while the substrate carrier is supported by the platform; and (3) a tunnel. The tunnel is adapted to extend from an opening in a clean room wall toward the platform and at least partially surround the platform. The tunnel is further adapted to direct a flow of air from the clean room wall toward the platform and out of the tunnel. Numerous other aspects are provided.
摘要翻译： 在第一方面，提供了一种自动开门器，其包括：（1）适于支撑衬底载体的平台; （2）门打开机构，其适于在基板载体由平台支撑的同时打开基板载体的门; 和（3）隧道。 隧道适于从洁净室壁中的开口延伸到平台并且至少部分地围绕平台。 隧道还适于将来自洁净室壁的空气流引向平台并且离开隧道。 提供了许多其他方面。
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公开(公告)号：US20050224315A1
公开(公告)日：2005-10-13
申请号：US10988190
申请日：2004-11-12
IPC分类号： C23G1/02 , H01L21/677
CPC分类号： H01L21/67733 , H01J37/32743 , H01L21/67736 , H01L21/67766 , H01L21/67775
摘要： In a first aspect, a substrate loading station is served by a conveyor which continuously transports substrate carriers. A substrate carrier handler that is part of the substrate loading station operates to exchange substrate carriers with the conveyor while the conveyor is in motion. A carrier exchange procedure may include moving an end effector of the substrate carrier handler at a velocity that substantially matches a velocity of the conveyor. A balancing mass is coupled directly or indirectly to a frame on which the substrate carrier handler is mounted and is adapted to accelerate in a direction opposite to the direction of end effector acceleration, as the end effector accelerates. Thus, inertial loads may be substantially balanced, and frame vibration reduced, despite potentially high rates of acceleration. Numerous other aspects are provided.
摘要翻译： 在第一方面中，基板装载站由连续输送基板载体的输送机供给。 作为基板装载站的一部分的基板载体处理器在输送机运动的同时与输送机交换基板载体。 载体交换过程可以包括以基本匹配输送机速度的速度移动基底载体处理器的端部执行器。 平衡块直接或间接地耦合到其上安装有基底载体处理器的框架上，并且适于在端部执行器加速时沿与端部执行器加速度的方向相反的方向加速。 因此，惯性负载可以基本平衡，并且框架振动减小，尽管潜在的高加速率。 提供了许多其他方面。
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公开(公告)号：US20050145464A1
公开(公告)日：2005-07-07
申请号：US10988168
申请日：2004-11-12
IPC分类号： H01L21/68 , B24B37/04 , B65G49/07 , H01L21/687 , B24B5/00
CPC分类号： B24B37/345 , H01L21/68707
摘要： In a first aspect, a first apparatus is provided for inter-station overhead transport of a substrate carrier. The first apparatus includes (1) an overhead transport mechanism; (2) a substrate carrier support suspended from the overhead transport mechanism and adapted to receive and support a substrate carrier; and (3) a stabilization apparatus adapted to limit rocking of the substrate carrier and substrate carrier support relative to the overhead transport mechanism. Numerous other aspects are provided.
摘要翻译： 在第一方面，提供了一种用于衬底载体的站间架空输送的第一装置。 第一装置包括（1）架空运输机构; （2）悬架在架空运输机构上并适于接收和支撑衬底载体的衬底载体支撑件; 以及（3）稳定装置，其适于限制衬底载体和衬底载体支撑件相对于架空输送机构的摆动。 提供了许多其他方面。
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公开(公告)号：US20050122504A1
公开(公告)日：2005-06-09
申请号：US10987950
申请日：2004-11-12
申请人： Michael Rice , Eric Englhardt , Robert Lowrance , Martin Elliott , Jeffrey Hudgens , Kirk Katwyk , Amitabh Puri
发明人： Michael Rice , Eric Englhardt , Robert Lowrance , Martin Elliott , Jeffrey Hudgens , Kirk Katwyk , Amitabh Puri
IPC分类号： G03G15/02 , H01L21/677
CPC分类号： H01L21/67775 , H01L21/67769
摘要： A movable portion of a substrate carrier handler is extended into a transport path along which a substrate carrier transport system transports a substrate carrier, respective kinematic coupling events are detected between corresponding interface elements of the movable portion and the substrate carrier, respective signals are generated in response thereto, and an alignment offset between the substrate carrier and the substrate carrier transport system is determined based on the signals. A movable portion matches an elevation, position, and/or a speed/velocity of a substrate carrier moving along the transport path. Sensors for detecting kinematic coupling and generating signals in response thereto are provided on the movable portion. An end effector includes a support with interface elements and sensors for detecting kinematic coupling and generating respective signals. A substrate carrier handler includes a movable portion, interface elements, sensors, and a controller for receiving signals and determining an alignment offset.
摘要翻译： 衬底载体处理器的可移动部分延伸到传送路径中，衬底载体传输系统沿着传送路径传送衬底载体，在可移动部分的对应界面元件和衬底载体之间检测到相应的运动耦合事件， 基于这些信号来确定衬底载体和衬底载体传输系统之间的对准偏移。 可移动部分匹配沿着传送路径移动的衬底载体的高度，位置和/或速度/速度。 用于检测运动耦合和响应于此产生信号的传感器设置在可动部分上。 端部执行器包括具有接口元件的支撑件和用于检测运动耦合并产生相应信号的传感器。 基板载体处理器包括可移动部分，接口元件，传感器和用于接收信号并确定对准偏移的控制器。
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