公开(公告)号：US10137570B2

公开(公告)日：2018-11-27

申请号：US14647366

申请日：2013-11-26

Applicant: NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY

Inventor： Kenji Hirota ,  Shinichi Imai ,  Shiro Hara ,  Hitoshi Maekawa

IPC: B25J9/10 ,  B25J18/04 ,  H01L21/677 ,  B25J18/02

Abstract: The present invention provides a transfer robot which has a simple structure and a small occupied area in an operation.A transfer robot of the present invention includes a support member fixed to a side wall or the like, a transfer arm by which a hand member is held capable of linear movement, and first and second link members. One end portions of the first and second link members are rotatably linked to the support member, respectively. Another end portions of the first and second link members are rotatably linked to the transfer arm, respectively. The hand member holds/transfers a work. A rotational driving force applied to a linking portion between the support member and the first link member is transmitted to the transfer arm by a predetermined mechanism and linearly moves the hand member. The transfer arm moves by rotating the first link member or the second link member.