公开(公告)号：US11686479B2

公开(公告)日：2023-06-27

申请号：US17210361

申请日：2021-03-23

Applicant: NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY

Inventor： Shiro Hara ,  Hitoshi Maekawa ,  Sommawan Khumpuang ,  Takashi Yajima ,  Yuuki Ishida

IPC: F24F3/167 ,  F24F3/04 ,  F24F11/49 ,  F24F11/74 ,  F24F110/30 ,  F24F110/40

CPC classification number: F24F3/167 ,  F24F3/04 ,  F24F11/49 ,  F24F11/74 ,  F24F2110/30 ,  F24F2110/40

Abstract: An encapsulated cleanroom system comprising a processing chamber and a storage section in which the processing chamber is stored, wherein, during operation, the pressure in the storage section is lower or higher than the pressures in the processing chamber and exterior space. The system can simultaneously prevent the entry of outside gases into its processing chamber and the leakage of the gases inside the processing chamber to the exterior space.