公开(公告)号：US20030140710A1

公开(公告)日：2003-07-31

申请号：US10044956

申请日：2002-01-15

Applicant: National Inst. of Advanced Ind. Science and Tech

Inventor： Keiji Nakayama ,  Kanichi Hatsukano

IPC: G01N003/24

CPC classification number: G01N19/04 ,  G01N3/42 ,  G01N27/62 ,  G01N2203/0082 ,  G01N2203/0282 ,  G01N2203/0617 ,  G01N2203/0676 ,  G01N2203/0682

Abstract: The present invention is formed by detecting the charged particles generated during film peeling and fragility breaking, so that it is possible to specify a peel occurring time and a fragility breaking time, with a high sensitivity and a high accuracy. In this way, it becomes possible to correctly measure the peel strength and the fragility breaking strength. The method of the invention comprises the steps of pressing an indenter into a test object and measuring an indentation load as well as an indentation depth, while at the same time detecting charged particles omitted from a peel starting point or a breakage starting point; specifying a peel occurring time and a fragility breaking time when charged particles are increased; measuring a peel strength and/or a fragility breaking strength.

Abstract translation: 本发明通过检测在膜剥离和脆性断裂期间产生的带电粒子形成，从而可以以高灵敏度和高精度指定剥离发生时间和脆性断裂时间。 以这种方式，可以正确地测量剥离强度和脆性断裂强度。 本发明的方法包括以下步骤：将压头压入测试对象并测量压痕负荷以及压痕深度，同时从剥离起点或断裂起点检测带电粒子; 指定带电粒子增加时的剥离发生时间和脆性断裂时间; 测量剥离强度和/或脆性断裂强度。