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公开(公告)号:US20250087426A1
公开(公告)日:2025-03-13
申请号:US18960931
申请日:2024-11-26
Inventor: Takehito GOTO , Naoya KITAMURA , Manabu KANOU , Ryosuke KIKUCHI
Abstract: A capacitor includes a metallic tantalum, an electric conductor, and an oxidized tantalum film. The oxidized tantalum film is disposed between the metallic tantalum and the electric conductor, where the oxidized tantalum film is in contact with the metallic tantalum. The oxidized tantalum film includes a first portion containing fluorine, and a second portion. The second portion is located closer to the metallic tantalum than the first portion in a thickness direction of the oxidized tantalum film. And a fluorine concentration at the second portion is lower than a fluorine concentration at the first portion.