公开(公告)号：US09039280B2

公开(公告)日：2015-05-26

申请号：US13747433

申请日：2013-01-22

Applicant: Purdue Research Foundation

Inventor： Dimitrios Peroulis ,  Andrew S Kovacs ,  David Joseph Koester ,  Farshid Sadeghi ,  Sean M Scott ,  Douglas Edward Adams

IPC: G01K7/00 ,  G01K7/34 ,  G01K1/02 ,  G01K13/08

CPC classification number: G01K7/34 ,  G01K1/024 ,  G01K13/08

Abstract: A micro-electromechanical system-type (MEMS) sensor arrangement for wirelessly measuring temperatures is disclosed. The MEMS sensor arrangement includes a multimorph sensor, a sensor coil coupled to the multimorph sensor, and a readout coil configured to be magnetically coupled to the sensor coil to i) energize the sensor coil, and ii) provide a readout of the natural frequency of the multimorph sensor, the sensor coil and the readout coil.

Abstract translation: 公开了一种用于无线测量温度的微机电系统型（MEMS）传感器装置。 MEMS传感器装置包括多像素传感器，耦合到多像素传感器的传感器线圈和被配置为磁耦合到传感器线圈的读出线圈，以便i）激励传感器线圈，以及ii）提供读出的固有频率 多像素传感器，传感器线圈和读出线圈。