公开(公告)号：US20200168743A1

公开(公告)日：2020-05-28

申请号：US16594284

申请日：2019-10-07

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Tae Hoon YANG ,  Kibum KIM ,  Jongjun BAEK ,  Byung Soo SO ,  Jong chan LEE ,  Woong Hee JEONG ,  Jaewoo JEONG

IPC: H01L29/786 ,  H01L27/12

Abstract: A display apparatus includes a base substrate, an active pattern on the base substrate including a source region, a drain region, and a channel region that is doped between the source region and the drain region, the channel region including polycrystalline silicon, and a gate electrode overlapping the channel region of the active pattern. The channel region may include a lower portion, an upper portion, and an intermediate portion between the upper portion and the lower portion, and a dopant density of the lower portion may be 80% or more of a dopant density of the upper portion.