公开(公告)号：US20220130876A1

公开(公告)日：2022-04-28

申请号：US17402756

申请日：2021-08-16

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Jonghoon PARK ,  Bumsuk KIM ,  Yun LEE ,  Bomi L. KIM ,  Kwanhee LEE ,  Yeongi JOUNG

IPC: H01L27/146

Abstract: A pixel array including: a plurality of pixel groups, each pixel group including: a plurality of unit pixels respectively including photoelectric conversion elements disposed in a semiconductor substrate; trench structures disposed in the semiconductor substrate and extending in a vertical direction from a first surface of the semiconductor substrate to a second surface of the semiconductor substrate to electrically and optically separate the photoelectric conversion elements from each other; and a microlens disposed above or below the semiconductor substrate, the microlens covering all of the photoelectric conversion elements in the plurality of unit pixels to focus an incident light to the photoelectric conversion elements.