公开(公告)号：US20220213617A1

公开(公告)日：2022-07-07

申请号：US17646062

申请日：2021-12-27

Applicant: SHOWA DENKO K.K

Inventor： Nobutoshi SUDOH ,  Rimpei KINDAICHI

IPC: C30B29/36 ,  C30B35/00 ,  C30B23/02

Abstract: A silicon carbide single crystal manufacturing apparatus includes a crucible constituted by a crucible body and a crucible lid; and a base that is placed on the underside of the crucible lid and holds a silicon carbide seed crystal, wherein the base has a structure in which a plurality of graphite plates having anisotropy of the thermal expansion coefficient are laminated and bonded, and when viewed in a plan view from the lamination direction, in the plurality of graphite plates, the maximum directional axes of the thermal expansion coefficient between adjacent graphite plates are orthogonal to each other or the maximum directional axes intersect within an angle range of ±15° from orthogonal.