公开(公告)号：US10916622B2

公开(公告)日：2021-02-09

申请号：US16144168

申请日：2018-09-27

Applicant: STMICROELECTRONICS S.R.L.

Inventor： Davide Giuseppe Patti ,  Giuseppina Valvo ,  DelfoNunziato Sanfilippo

IPC: H01L49/02 ,  H01L23/522

Abstract: In various embodiments, the present disclosure provides capacitors and methods of forming capacitors. In one embodiment, a capacitor includes a substrate, a first electrode on the substrate, a second electrode, and a first dielectric layer. A portion of the first electrode is exposed in a contact region. The first dielectric layer includes a first dielectric region between the first electrode and the second electrode, and a second dielectric region between the first dielectric region and the contact region. The second dielectric region is contiguous to the first dielectric region, and a surface of the second dielectric region defines a surface path between the first electrode and the contact region. The second dielectric region has a plurality of grooves that increase a spatial extension of said surface path.

公开(公告)号：US11574996B2

公开(公告)日：2023-02-07

申请号：US17170550

申请日：2021-02-08

Applicant: STMICROELECTRONICS S.R.L.

Inventor： Davide Giuseppe Patti ,  Giuseppina Valvo ,  DelfoNunziato Sanfilippo

IPC: H01L49/02 ,  H01L23/522

Abstract: In various embodiments, the present disclosure provides capacitors and methods of forming capacitors. In one embodiment, a capacitor includes a substrate, a first electrode on the substrate, a second electrode, and a first dielectric layer. A portion of the first electrode is exposed in a contact region. The first dielectric layer includes a first dielectric region between the first electrode and the second electrode, and a second dielectric region between the first dielectric region and the contact region. The second dielectric region is contiguous to the first dielectric region, and a surface of the second dielectric region defines a surface path between the first electrode and the contact region. The second dielectric region has a plurality of grooves that increase a spatial extension of said surface path.