公开(公告)号：US10922807B2

公开(公告)日：2021-02-16

申请号：US16174022

申请日：2018-10-29

Applicant: STMICROELECTRONICS S.r.l.

Inventor： Lidia Moioli ,  Pasqualina Fragneto ,  Beatrice Rossi ,  Diego Carrera ,  Giacomo Boracchi ,  Mauro Fumagalli ,  Elena Tagliabue ,  Paolo Giugni ,  Annalisa Aurigemma

IPC: G06T7/00

Abstract: A device includes image generation circuitry and a convolutional neural network. The image generation circuitry, in operation, generates a binned representation of a wafer defect map (WDM). The convolutional-neural-network, in operation, generates and outputs an indication of a root cause of a defect associated with the WDM based on the binned representation of the WDM and a data-driven model associating WDMs with classes of a defined set of classes of wafer defects.