SELECTIVE AND SELF-ALIGNED SOI THINNING FOR RF SWITCH APPLICATIONS

    公开(公告)号:US20250107230A1

    公开(公告)日:2025-03-27

    申请号:US18473861

    申请日:2023-09-25

    Inventor: Franck JULIEN

    Abstract: A transistor device comprising a silicon-on-insulator (SOI) substrate having a plurality of polysilicon gates including a plurality of recessed gates and a plurality of non-recessed gates. The plurality of recessed gates being recessed in a top silicon layer of the SOI substrate and the plurality of non-recessed gates being on the top silicon layer. The plurality of recessed gates comprising an upper cap portion on a bottom buried portion that is in a recess of the SOI substrate. Methods of manufacturing the device are provided.

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