公开(公告)号：US20140096606A1

公开(公告)日：2014-04-10

申请号：US14041180

申请日：2013-09-30

Applicant: STMicroelectronics S.r.l.

Inventor： Davide Giuseppe Patti ,  Alessandro Mascali ,  Alfio Russo

IPC: G01V7/08

CPC classification number: G01V7/08 ,  G01V7/00 ,  G01V7/04

Abstract: A semiconductor detector of gravitational waves of a first frequency may include an oscillator having a metal coated oscillating member over a metal coated semiconductor substrate to be subjected to a Casimir attraction force towards the semiconductor substrate. The oscillator may be configured to exert a force to counterbalance the Casimir attraction force causing the oscillating member oscillates with a main harmonic resonance frequency equal to the first frequency. A displacement sensor may be coupled to the substrate and oscillating member and configured to sense oscillations and to generate corresponding sense signals. A pass-band filter may be tuned to the main harmonic resonance frequency and configured to generate band-pass replica signals of the sense signals, and an airtight package may be configured to keep a vacuum between the oscillating member and the semiconductor substrate. An array of semiconductor detectors and a method of detecting gravitational waves are also disclosed.

Abstract translation: 第一频率的重力波的半导体检测器可以包括在金属涂覆的半导体衬底上具有金属涂覆的振荡元件的振荡器，以经受对半导体衬底的卡西米尔吸引力。 振荡器可以被配置为施加力以平衡卡西米尔吸引力，导致振荡部件以等于第一频率的主谐波谐振频率振荡。 位移传感器可以耦合到衬底和振荡构件并且被配置为感测振荡并产生相应的感测信号。 可以将通带滤波器调谐到主谐波谐振频率并被配置为产生感测信号的带通复制信号，并且气密封装可以被配置为在振荡构件和半导体衬底之间保持真空。 还公开了一种半导体检测器阵列和一种检测引力波的方法。