公开(公告)号：US20190162540A1

公开(公告)日：2019-05-30

申请号：US16263416

申请日：2019-01-31

Applicant: STMicroelectronics S.r.l.

Inventor： Luca CORONATO ,  Gabriele CAZZANIGA

IPC: G01C19/5747 ,  G01C19/5712 ,  G01C19/02

Abstract: An integrated MEMS structure includes a driving assembly anchored to a substrate and actuated with a driving movement. A pair of sensing masses suspended above the substrate and coupled to the driving assembly via elastic elements is fixed in the driving movement and performs a movement along a first direction of detection, in response to an external stress. A coupling assembly couples the pair of sensing masses mechanically to couple the vibration modes. The coupling assembly is formed by a rigid element, which connects the sensing masses and has a point of constraint in an intermediate position between the sensing masses, and elastic coupling elements for coupling the rigid element to the sensing masses to present a first stiffness to a movement in phase-opposition and a second stiffness, greater than the first, to a movement in phase, of the sensing masses along the direction of detection.

公开(公告)号：US20170322028A1

公开(公告)日：2017-11-09

申请号：US15654584

申请日：2017-07-19

Applicant: STMICROELECTRONICS S.R.L.

Inventor： Luca CORONATO ,  Gabriele CAZZANIGA

IPC: G01C19/5747 ,  G01C19/5712 ,  G01C19/02

CPC classification number: G01C19/5747 ,  G01C19/5712 ,  G01P9/02 ,  Y10T29/49002

Abstract: An integrated MEMS structure includes a driving assembly anchored to a substrate and actuated with a driving movement. A pair of sensing masses suspended above the substrate and coupled to the driving assembly via elastic elements is fixed in the driving movement and performs a movement along a first direction of detection, in response to an external stress. A coupling assembly couples the pair of sensing masses mechanically to couple the vibration modes. The coupling assembly is formed by a rigid element, which connects the sensing masses and has a point of constraint in an intermediate position between the sensing masses, and elastic coupling elements for coupling the rigid element to the sensing masses to present a first stiffness to a movement in phase-opposition and a second stiffness, greater than the first, to a movement in phase, of the sensing masses along the direction of detection.