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公开(公告)号:US20210242323A1
公开(公告)日:2021-08-05
申请号:US17161059
申请日:2021-01-28
Applicant: STMicroelectronics S.r.l.
Inventor: Davide Giuseppe PATTI , Mario Giovanni SCURATI , Marco MORELLI
IPC: H01L29/45 , H01L29/78 , H01L29/10 , H01L21/285 , H01L29/66
Abstract: A vertical conduction electronic power device includes a body delimited by a first and a second surface and having an epitaxial layer of semiconductor material, and a substrate. The epitaxial layer is delimited by the first surface of the body and the substrate is delimited by the second surface of the body. The epitaxial layer houses at least a first and a second conduction region having a first type of doping and a plurality of insulated-gate regions, which extend within the epitaxial layer. The substrate has at least one silicide region, which extends starting from the second surface of the body towards the epitaxial layer.