公开(公告)号：US20230194910A1

公开(公告)日：2023-06-22

申请号：US17559534

申请日：2021-12-22

Applicant: STMicroelectronics S.r.l. ,  Politecnico Di Milano

Inventor： Valentina ZEGA ,  Chiara GAZZOLA ,  Luca Giuseppe FALORNI ,  Attilio FRANGI

IPC: G02F1/035

CPC classification number: G02F1/035 ,  G02F2202/32

Abstract: A MEMS based device includes a phononic crystal body formed from unit cells and having a defect line extending through the phononic crystal body. Unit cells inside of the defect line lack a same phononic bandgap as the unit cells outside of the defect line. An input MEMS resonator is mechanically coupled to a first end of the defect line, and an output MEMS resonator is mechanically coupled to a second end of the defect line. Each of the unit cells outside of the defect line has an identical geometry. The input MEMS resonator and output MEMS resonator each have a natural frequency within the same phononic bandgap possessed by the unit cells outside of the defect line. There may be more than one defect line, and in such cases, the MEMS device may include more than one input MEMS resonator and/or more than one output MEMS resonator.