公开(公告)号：US20240233111A1

公开(公告)日：2024-07-11

申请号：US18537975

申请日：2023-12-13

Applicant: Samsung Display Co., Ltd.

Inventor： DOOHYOUNG LEE ,  KUHWAN CHUNG ,  JOO DONG YUN ,  DONGHA LEE ,  JUWON LEE ,  SANGHYUNG LIM

IPC: G06T7/00 ,  G06T7/62

CPC classification number: G06T7/0008 ,  G06T7/001 ,  G06T7/62 ,  G06T2207/20084 ,  G06T2207/30148

Abstract: Provided is an inspection device including an image output unit configured to output an inspection image for an inspection target including an oxide semiconductor, a storage unit configured to store a plurality of reference images and a plurality of reference data indicating oxygen vacancy distribution, which are generated through an artificial neural network, and a neural network processing unit configured to compare the reference images with the inspection image and select a selection reference image corresponding to the inspection image, and output an oxygen vacancy distribution image based on selection reference data corresponding to the selection reference image.