公开(公告)号：US20210226166A1

公开(公告)日：2021-07-22

申请号：US17078015

申请日：2020-10-22

Applicant: Samsung Display Co., Ltd.

Inventor： Young Seok BAEK ,  Chong Sup CHANG ,  Hana SEO ,  Eui Kang HEO

IPC: H01L51/52 ,  H01L51/56

Abstract: A method of manufacturing a display device may include sequentially forming a first conductive layer, a second conductive layer including copper (Cu), a third conductive layer, and a fourth conductive layer on a substrate, patterning the first conductive layer, the second conductive layer, the third conductive layer, and the fourth conductive layer together to form a conductive pattern including a first layer, a second layer, a third layer, and a fourth layer sequentially on the substrate, removing the fourth layer of the conductive pattern, forming a protective layer covering at least a sidewall of the conductive layer on the substrate, and forming a display element on the protective layer.