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公开(公告)号:US20250098172A1
公开(公告)日:2025-03-20
申请号:US18773994
申请日:2024-07-16
Applicant: Samsung Electronics Co., Ltd.
Inventor: Hak Seon KIM , Kang Oh YUN , Dong Jin LEE , Jae Duk LEE
Abstract: A semiconductor memory device includes a peripheral circuit structure; and a cell structure including a cell substrate and a gate electrode, on the peripheral circuit structure. The peripheral circuit structure includes a peripheral circuit board including a first surface facing the cell structure and a second surface opposite to the first surface, a first circuit element on the first surface of the peripheral circuit board, a first wiring line electrically connected to the first circuit element in a first interlayer insulating layer, a capacitor dielectric layer covering the second surface of the peripheral circuit board, a first capacitor electrode in the capacitor dielectric layer, a second capacitor electrode spaced apart from the first capacitor electrode in the capacitor dielectric layer, and a first connection via electrically connecting the first capacitor electrode with the first wiring line by passing through the peripheral circuit board.