公开(公告)号：US20210202217A1

公开(公告)日：2021-07-01

申请号：US17027460

申请日：2020-09-21

Applicant: Samsung Electronics Co., Ltd.

Inventor： Hongtaek Lim ,  Junghyeon Kim ,  Sanggon Shin ,  Oleg FEYGENSON ,  Kyuho Lee ,  Donghoon Han ,  Kwangpyo Hong

IPC: H01J37/32 ,  C23C16/458

Abstract: An edge ring includes an annular body portion having a bottom surface and a top surface, a first step portion extending along an inner periphery of the body portion and having an annular first bottom surface positioned higher than the bottom surface of the body portion by a first height, an inclined portion extending along an inner periphery of the first step portion and having an inclined bottom surface extending at a first angle with respect to a first plane in which the first bottom surface is placed, a second step portion extending along an inner periphery of the inclined portion and having a second bottom surface positioned higher than the bottom surface of the body portion by a second height greater than the first height, and a plurality of passages extending outwardly from the first bottom surface of the first step portion at a second angle with respect to the first bottom surface.