公开(公告)号：US20040173872A1

公开(公告)日：2004-09-09

申请号：US10706106

申请日：2003-11-13

Applicant: Samsung Electronics Co., Ltd.

Inventor： Young-jun Park ,  In-sang Song ,  In-taek Han

IPC: H01L029/00

CPC classification number: B81B3/0008 ,  B81B2201/018 ,  H01H59/0009

Abstract: Provided is a microelectro mechanical system (MEMS). The provided MEMS switch includes a substrate; a signal line formed on the substrate; a beam deformed by an electrostatic force to electrically switch with the signal line; and a spring type contact unit formed on the signal line to electrically contact the beam and elastically deformed by an external force. Thus, stability of the contact between the contact unit and the beam is improved. In particular, even when the beam or the contact unit under the beam is unbalanced, the contact unit can elastically contact the beam to obtain a stable electrical switching operation.

Abstract translation: 提供了一种微电子机械系统（MEMS）。 所提供的MEMS开关包括基板; 形成在基板上的信号线; 通过静电力变形的电子束与信号线电开关的光束; 以及弹簧式接触单元，形成在信号线上，以电接触梁并通过外力弹性变形。 因此，提高了接触单元和梁之间的接触的稳定性。 特别地，即使当梁或梁下的接触单元不平衡时，接触单元可以弹性地接触梁以获得稳定的电开关操作。