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    Method of wet etching vias and articles formed thereby
    5.
    发明授权
    Method of wet etching vias and articles formed thereby 失效
    湿法蚀刻通孔和​​由此形成的制品的方法

    公开(公告)号：US07365437B2

    公开(公告)日：2008-04-29

    申请号：US11337249

    申请日：2006-01-23

    申请人： Kanakasabapathi Subramanian ,  Jeffrey Bernard Fortin ,  Wei-Cheng Tian

    发明人： Kanakasabapathi Subramanian ,  Jeffrey Bernard Fortin ,  Wei-Cheng Tian

    IPC分类号： H01L29/40

    CPC分类号： H01L21/30617 ,  H01L21/76898 ,  H01L23/481 ,  H01L2223/54453 ,  H01L2924/0002 ,  H01L2924/00

    摘要： A method for forming smooth walled, prismatically-profiled through-wafer vias and articles formed through the method. An etch stop material is provided on a wafer, which may be a silicon wafer. A mask material is provided on the etch stop material and patterned in such a way as to lead to the formation of vias that have at least one pair of opposing side walls that run parallel to a plane in the wafer. A wet etchant, such as potassium hydroxide, is used to etch vias in the wafer. The use of a wet etchant leads to the formation of smooth side walls. This method allows an aspect ratio of height versus width of the vias of greater than 75 to 1.

    摘要翻译： 用于形成通过该方法形成的平滑壁，棱镜通孔晶片通孔和制品的方法。 在晶片上提供蚀刻停止材料，晶片可以是<110>硅晶片。 在蚀刻停止材料上提供掩模材料，并以这样的方式图案化，以便导致形成通孔，其具有平行于晶片中的111平面延伸的至少一对相对的侧壁。 使用诸如氢氧化钾的湿蚀刻剂来蚀刻晶片中的通孔。 使用湿蚀刻剂导致形成平滑的侧壁。 该方法允许通孔的高度与宽度的长宽比大于75至1。

    ITERATIVE STAINING OF BIOLOGICAL SAMPLES
    6.
    发明申请
    ITERATIVE STAINING OF BIOLOGICAL SAMPLES 审中-公开
    生物样本的迭代染色

    公开(公告)号：US20120135449A1

    公开(公告)日：2012-05-31

    申请号：US13365525

    申请日：2012-02-03

    申请人： Jun Xie ,  Robert John Filkins ,  Fiona Mary Ginty ,  Michael Christopher Montalto ,  Anup Sood ,  Jeffrey Bernard Fortin ,  Wei-Cheng Tian ,  Michael John Gerdes

    发明人： Jun Xie ,  Robert John Filkins ,  Fiona Mary Ginty ,  Michael Christopher Montalto ,  Anup Sood ,  Jeffrey Bernard Fortin ,  Wei-Cheng Tian ,  Michael John Gerdes

    IPC分类号： G01N21/75 ,  C12M1/34

    CPC分类号： G01N1/312

    摘要： Automated methods and devices that facilitate iterative staining of biological samples from imaging applications are provided. The methods include the steps of providing a small volume flow cell containing a biological sample, applying a stain to the biological sample, combining at least two precursor reagents to form an activated destaining agent and wherein the activated destaining agent decomposition rate is greater than or similar to the destaining reaction rate, flowing the destaining agent over the biological sample at a flow rate that is greater than the decomposition rate of the activated destaining agent, and releasing the sample from the flow cell wherein the integrity of the sample is intact. The process of staining, combining and flowing may be iteratively repeated. Also disclosed herein are devices for iterative staining of biological samples comprising a flow cell, in fluid communication with a premixer, wherein the volume capacity of the premixer is smaller than about five times the volume capacity of the flow cell.

    摘要翻译： 提供了促进成像应用中生物样品的迭代染色的自动化方法和装置。 所述方法包括以下步骤：提供含有生物样品的小体积流动池，向生物样品施加染色，将至少两种前体试剂结合以形成活化的脱色剂，并且其中所述活化脱色剂分解速率大于或等于 以脱色反应速率使脱色剂以大于活化脱色剂的分解速率的流速流过生物样品，并将样品从流动池中释放出来，其中样品的完整性是完整的。 染色，组合和流动的过程可以迭代地重复。 本文还公开了用于重复染色生物样品的装置，其包括与预混合器流体连通的流动池，其中预混合器的体积容量小于流动池的体积容量的约五倍。