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1.发明授权公开(公告)号：US11270949B2
公开(公告)日：2022-03-08
申请号：US16627841
申请日：2019-12-19
IPC: H01L23/544 , G02F1/1337
Abstract: The present invention provides a substrate and a method for monitoring positions of boundaries of a film layer disposed on a substrate. A plurality of sets of positioning units are provided in a non-display region of the substrate. Each set of the positioning units includes at least two primary positioning marks and corresponding primary positioning rulers. There are at least two secondary positioning marks and corresponding secondary positioning rulers disposed between the two adjacent primary positioning marks. The present invention determines a specific position of the boundaries of the film layer according to readings of the positioning rulers of the plurality of sets of positioning units corresponding to the boundaries of the film layer.
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