MANUFACTURING METHODS OF DISPLAY PANELS AND DISPLAY PANELS

    公开(公告)号:US20240332307A1

    公开(公告)日:2024-10-03

    申请号:US18220923

    申请日:2023-07-12

    Inventor: Jiaojiao SHI

    CPC classification number: H01L27/1218 H01L27/1233 H01L27/1262

    Abstract: A manufacturing method of a display panel includes following steps: forming a semiconductor layer on a substrate, in which the semiconductor layer includes a semiconductor sub-layer and an ohmic contact layer including a first sub-ohmic contact layer and a second sub-ohmic contact layer, and a volume flow rate of phosphine for forming the first sub-ohmic contact layer is greater than or equal to 6590 sccm and less than or equal to 12590 sccm, and a volume flow rate of phosphine for forming the second sub-ohmic contact layer is greater than or equal to 21000 sccm and less than or equal to 27000 sccm.

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