公开(公告)号：US20240328979A1

公开(公告)日：2024-10-03

申请号：US18602374

申请日：2024-03-12

Applicant: TDK CORPORATION

Inventor： Takumi MATSUO ,  Makoto Shibata ,  Shizuko Ono

IPC: G01N27/12

CPC classification number: G01N27/12

Abstract: A gas sensor includes a base member, a first insulating film, a second insulating film, a heater section, a first compensation element, a second compensation element, and a detection element. The base member is provided with a cavity. The first insulating film is formed above the cavity and on a cavity peripheral portion. The second insulating film is formed so as to overlap with the first insulating film. The heater section is formed between the first insulating film and the second insulating film. The first compensation element includes a first dummy material portion and a first compensation detection portion. The second compensation element includes a second dummy material portion and a second compensation detection portion. The detection element includes a detection material portion and a reaction detection portion.

公开(公告)号：US20240201117A1

公开(公告)日：2024-06-20

申请号：US18533621

申请日：2023-12-08

Applicant: TDK CORPORATION

Inventor： Makoto SHIBATA ,  Shizuko Ono ,  Takumi Matsuo

IPC: G01N27/12

CPC classification number: G01N27/123

Abstract: A gas sensor includes a base member, a first insulating film, a second insulating film, a heater section, a flat section, and a gas detection section. The base member is provided with a cavity. The first insulating film includes beam portions connected to a peripheral portion of the cavity of the base member and a first-insulating-film membrane portion held over the cavity by the beam portions. The second insulating film is laminated on an upper side of the first insulating film. The heater section is provided on an upper side of the first-insulating-film membrane portion. The flat section is provided between the first-insulating-film membrane portion and the second insulating film and disposed closer to a center of the first-insulating-film membrane portion than the heater section and forms a flat surface. The gas detection section is disposed on at least the second insulating film over the flat section.