Efficient method of extracting the pull-in parameters of an electrostatically activated mems device for the purpose of designing the device
    1.
    发明申请
    Efficient method of extracting the pull-in parameters of an electrostatically activated mems device for the purpose of designing the device 失效
    提供静电激活的MEMs设备的拉入参数的高效方法,用于设计设备

    公开(公告)号:US20030028360A1

    公开(公告)日:2003-02-06

    申请号:US10160404

    申请日:2002-06-04

    CPC classification number: B81C99/006 H02N1/006

    Abstract: A method of efficiently extracting the pull-in parameters of an electrostatically activated actuator. The actuator is modeled as an elastic element. For each of a plurality of deformations of the elastic element, a corresponding voltage is calculated. The highest such voltage is the pull-in voltage of the actuator. The corresponding deformation is the pull-in deformation of the actuator. Each deformation is defined by fixing a displacement of one degree of freedom of the elastic body and calculating corresponding equilibrium displacements of all the other degrees of freedom without the application of any external mechanical forces to ensure equilibrium. The actuator is altered to optimize whichever pull-in parameter is relevant to the desired application of the actuator.

    Abstract translation: 一种有效提取静电激活致动器的拉入参数的方法。 致动器被建模为弹性元件。 对于弹性元件的多个变形中的每一个,计算相应的电压。 最高的这种电压是执行器的引入电压。 相应的变形是致动器的拉入变形。 通过固定弹性体的一个自由度的位移并计算所有其他自由度的相应的平衡位移来定义每个变形,而不必施加任何外部机械力来确保平衡。 致动器被改变以优化与执行器的期望应用相关的哪个拉入参数。

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