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公开(公告)号:US20240063118A1
公开(公告)日:2024-02-22
申请号:US17820020
申请日:2022-08-16
Applicant: TEXAS INSTRUMENTS INCORPORATED
Inventor: William Harrison , Sylvester Ankamah-Kusi , Yiqi Tang , Rajen M. Murugan
IPC: H01L23/528 , H01L23/00 , H01L23/522 , H01L21/768
CPC classification number: H01L23/528 , H01L24/13 , H01L23/5226 , H01L21/76885 , H01L2224/13025 , H01L2224/13147
Abstract: A semiconductor device is described herein. The semiconductor device generally includes a metal fabrication layer disposed on a substrate. The semiconductor device generally includes a dielectric layer having a first plurality of vias aligned with a first metallization region of the metal fabrication layer and a second plurality of vias aligned with a second metallization region of the metal fabrication layer, the dielectric layer disposed on top of the metal fabrication layer. The semiconductor device generally includes a metal layer disposed on the dielectric layer and having a plurality of metal routings, each of the metal regions disposed over both the first metallization region and the second metallization region, each of the plurality of metal routings have a same width. The semiconductor device generally includes an insulation layer disposed on the metal layer, the insulation layer having a plurality of openings to the metal routings of the metal layer.