公开(公告)号：US20220413379A1

公开(公告)日：2022-12-29

申请号：US17894329

申请日：2022-08-24

Applicant: TOPPAN INC.

Inventor： Naoya TAKADA ,  Kazunori SEKI ,  Yutaka KODERA

IPC: G03F1/64 ,  C01B32/05 ,  B32B9/04 ,  B32B3/26 ,  B32B9/00

Abstract: A technique that enables production of pellicle membranes that are better resistant to breakage when subjected to force exerted thereon in the thickness direction thereof and that have high transmittance to light. A pellicle membrane of the present invention includes a plurality of laminated layers, where at least one of the layers is provided with at least one hole having a width or diameter of 10 nm to 500 nm.

公开(公告)号：US20220260902A1

公开(公告)日：2022-08-18

申请号：US17734447

申请日：2022-05-02

Applicant: TOPPAN INC.

Inventor： Naoya TAKADA ,  Kazunori SEKI ,  Yutaka KODERA

IPC: G03F1/64

Abstract: A technique that can achieve a pellicle film made of carbon nanotubes and having high in-plane transmittance uniformity. The pellicle film contains a plurality of first carbon nanotubes extending in a first direction and arrayed in the radial direction, and a plurality of second carbon nanotubes extending in a second direction intersecting the first direction, and arrayed in their radial direction.