摘要:
When forming a trench of a narrow width in a thick semiconductor layer, a trench can be formed without the occurrence of semiconductor residue. In this Specification, a semiconductor device in which a trench is formed in a semiconductor layer is disclosed. In the semiconductor layer of the semiconductor device, a compensation pattern which compensates for sudden changes in the width of the trench is formed at a place at which the width of the trench changes suddenly. In the semiconductor layer of the above-described semiconductor device, since a compensation pattern is formed at a place at which the trench width changes suddenly, in the case where forming the trench using a deep RIE method, the occurrence of steep inclined portions arising from semiconductor residue can be prevented. Consequently, when forming a trench of a narrow width in a thick semiconductor layer, the occurrence of semiconductor residue can be prevented.
摘要:
The micro device includes a support substrate, and a movable structure configured to move with respect to the support substrate. At least one of the support substrate and the movable structure is provided with at least one protrusion protruding towards the other of the support substrate and the movable structure. Further, a base portion extending into the one of the support substrate and the movable structure is provided integrally with the at least one protrusion. With this configuration, the protrusion is securely held by the base portion, and the detachment of the protrusion can therefore be prevented even after repeated collisions between the support substrate and the movable structure via the protrusion.
摘要:
A structure having a first movable portion displaced perpendicular to a substrate surface and a second movable portion displaced parallel to the substrate surface is realized by a laminated structure employing a nested structure for the first portion and the second portion. The laminated structure is provided with inner and outer movable portions. A y spring is connected to the outer portion, and the outer portion is supported in a y-axis direction by the y spring at a height apart from an outer substrate. A z spring is connected to the inner portion, and the inner portion is supported in a z-axis direction by the z spring at a height apart from the outer substrate. The outer portion and the z spring are at different heights from the substrate, and the z spring overpasses across the outer portion at a height apart from the outer movable portion.
摘要:
In a MEMS structure, a first trench which penetrates the first layer, the second layer and the third layer is formed, and a second trench which penetrates the fifth layer, the forth layer and the third layer is formed. The first trench forms a first part of an outline of the movable portion in a view along the stacked direction. The second trench forms a second part of the outline of the movable portion in the view along the stacked direction. At least a part of the first trench overlaps with the first extending portion in the view along the stacked direction.
摘要:
An apparatus with a second movable portion that moves along an x-axis direction and a z-axis direction and a first movable portion that only moves along the z-axis direction is disclosed. The apparatus is provided with a fixed portion fixed to a support portion, a plurality of first spring portions connected to the fixed portion, a first movable portion connected to the plurality of first spring portions, a second spring portion connected to the first movable portion, and a second movable portion connected to the second spring portion. A spring constant of each of the plurality of first spring portions in the z-axis direction is lower than spring constants of each of the plurality of first spring portions in the x-axis and a y-axis directions respectively, and a spring constant of the second spring portion in the x-axis direction is lower than spring constants of the second spring portion in the y-axis and the z-axis directions respectively. The first movable portion is configured to move along the z-axis but not to move along the x-axis and the y-axis nor to rotate around the z-axis, and the second movable portion is configured to move along the x-axis and the z-axis with respect to the support portion.
摘要:
The numbers of pulses of the CW signal and the CCW signal of the optical fiber gyro during a predetermined sampling duration are detected by samplers. An abnormality determiner determines that the optical fiber gyro is normal if at least one of the pulse numbers is greater than or equal to a threshold value. If both pulse numbers are smaller than the threshold value, the abnormality determiner determines that an abnormality, such as a circuit break, a bad connection, etc., has occurred, and outputs the result of determination to an output unit. The abnormality determiner may determine an abnormality on the basis of the presence/absence of quantization noise.
摘要:
An angular velocity detected by an angular velocity sensor (10) is integrated by a small angle matrix calculator (12) and a matrix adding calculator (14), and then restored as a posture angle (angular velocity posture angle) by a matrix posture angle calculator (16). A posture matrix is calculated by a tilt angle calculator (22) and an acceleration matrix calculator (24) and an acceleration detected by an acceleration sensor (20) is restored as a posture angle (acceleration posture angle) by a matrix posture angle calculator (26). Low pass filters (18, 28) each extract a low range component, the difference between the two is calculated by a differencer (30), and only the drift amount is extracted. A subtracter (32) removes the drift amount from the angular velocity posture angle and the result is output from an output device (34). In addition, a posture angle matrix calculator (36) converts the result to a posture matrix, which it feeds back to the matrix adding calculator (14).
摘要:
A structure is presented in which it is easy to adjust, to a determined value, distance between electrodes of a condenser formed in an electrostatic capacity-type displacement sensor. A displacement sensor has a conductive lower layer, an insulating layer stacked on the conductive lower layer and a conductive upper layer stacked on the insulating layer. The conductive lower layer is divided into a first lower region and a second lower region by a groove penetrating the conductive lower layer. The insulating layer is stacked on the conductive lower layer at selected portions. The conductive upper layer is stacked on the insulating layer at selected portions. The conductive upper layer has a beam connected via the insulating layer to the first lower region and the second lower region at a pair of ends of the beam. The conductive upper layer has a first upper portion forming one of electrodes of a first condenser. The first upper portion extends from a position above the first lower region to a position above the second lower region. The insulating layer is not formed between the first upper portion and the first lower region, but is formed between the first upper portion and the second lower region.
摘要:
An attitude angles calculation device (14) calculates attitude angles of a robot from the output values of an acceleration sensor (10). An attitude angles comparison device (16) compares attitude angles in a specified attitude which have been set in a register (20) and the attitude angles which have been detected, and outputs their differences to a correction values calculation device (18). The correction values calculation device (18) outputs correction devices to a zero point correction device (26) or a sensitivity correction device (28), so as to eliminate these differences. If would also be acceptable to set the attitude angles which are set in the register (20) from an input device (22).
摘要:
A touch sensor system includes buses, a plurality of touch sensor devices disposed on the buses, and an information integrating device that is connected to all the buses and integrates information from the touch sensor device. The touch sensor device includes a sensor unit and a signal processing unit that transmits a sensor data signal generated by processing an analog sensor signal to the information integrating device through the bus. The signal processing unit includes a digital converting unit, a threshold evaluating unit that gives a start permission of the signal process when a sensor value exceeds a preset threshold, an ID adding unit that adds a transmitter identification number to the sensor signal, and a data transmitting unit that outputs the sensor data signal to a signal line of the bus. Fast responses are made possible without increasing the amount of data and host processing load while including many touch sensor elements.