公开(公告)号：US20190051812A1

公开(公告)日：2019-02-14

申请号：US15671252

申请日：2017-08-08

Applicant: Texas Instruments Incorporated

Inventor： Wei-Yan Shih ,  Sudhanshu Khanna ,  Michael Zwerg ,  Juergen Luebbe ,  Gregory Allen North ,  Steven C. Bartling ,  Leah Trautmann ,  Scott Robert Summerfelt

IPC: H01L41/107 ,  B06B1/06 ,  H01L41/04 ,  H01L41/047

Abstract: A piezoelectric sensor with: (i) a capacitive element, comprising piezoelectric material; (ii) a pre-conditioning circuit, comprising circuitry for establishing a polarization of the capacitive element in a polarizing mode; and (iii) signal amplification circuitry for providing a piezoelectric-responsive output signal, in response to charge across the capacitive element in a sensing mode.