公开(公告)号：US20210002758A1

公开(公告)日：2021-01-07

申请号：US16761433

申请日：2019-05-16

申请人： ULVAC, INC.

发明人： Junichi SAKAMOTO ,  Kazuya SAITO ,  Junya KIYOTA ,  Masaki TAKEI ,  Akihiro YOKOYAMA

IPC分类号： C23C14/56 ,  C23C14/14 ,  C23C14/24 ,  C23C14/04

摘要： A roll-to-roll deposition apparatus includes a vacuum chamber, a film travel mechanism, a lithium source, and a first roller. The vacuum chamber is capable of maintaining a reduced-pressure state. The film travel mechanism is capable of causing a film to travel inside the vacuum chamber. The lithium source is capable of evaporating lithium inside the vacuum chamber. The first roller is disposed between a deposition surface of the film and the lithium source. The first roller has a transfer pattern that receives the lithium evaporated from the lithium source. The first roller transfers a pattern of a lithium layer corresponding to the transfer pattern to the deposition surface while rotating.