公开(公告)号：US3814504A

公开(公告)日：1974-06-04

申请号：US24872572

申请日：1972-04-28

Applicant: UNIVERSAL TECHNOLOGY

Inventor： BRADY J ,  GRILL W

IPC: G02B3/00 ,  G02B17/00 ,  G02B17/08 ,  G02B27/00

CPC classification number: G02B17/086 ,  G02B3/0056 ,  G02B3/0068 ,  G02B17/002 ,  G02B17/0808

Abstract: A reflecting-type fly''s eye lens array is described having extremely high resolution capabilities. By means of photoresist techniques, a first array of similar reflecting surfaces are formed on each of a first multitude of substantially identical curved surfaces of a transparent medium and a second array of similar reflecting surfaces are formed on each of a second multitude of substantially identical curved surfaces of a transparent medium. The surfaces of the two multitudes are aligned with each other in one-to-one relationship so that each curved surface of the first multitude has a common optical axis with a corresponding curved surface of the second multitude. In addition, the reflecting surfaces of the first and second arrays are shaped in the characteristic ring and dot patterns of a Cassegrain or Gregorian lens; and the curvatures of the reflecting surfaces are selected such that electromagnetic radiation incident upon each ring-shaped reflective surface is reflected to the corresponding dot-shaped reflective surface. As a result, a multitude of small reflecting lenses are formed having an extremely high resolution that permits the fabrication by photoresist techniques of elements having submicron dimensions.

Abstract translation: 描述了具有极高分辨率能力的反射型蝇眼透镜阵列。 通过光致抗蚀剂技术，在透明介质的第一多个基本相同的弯曲表面的每一个上形成相似反射表面的第一阵列，并且在第二多个基本相同的弯曲表面中的每一个上形成相似反射表面的第二阵列 透明介质的表面。 两个人的表面以一对一关系彼此对准，使得第一个人的每个曲面具有与第二个人的相应曲面的公共光轴。 此外，第一和第二阵列的反射表面成形为卡塞格林或格里高利透镜的特征环和点图案; 并且选择反射表面的曲率，使得入射到每个环形反射表面上的电磁辐射被反射到相应的点状反射表面。 结果，形成了许多小的反射透镜，其具有极高的分辨率，允许通过光致抗蚀剂技术制造具有亚微米尺寸的元件。