公开(公告)号：US10570507B2

公开(公告)日：2020-02-25

申请号：US15950152

申请日：2018-04-10

Applicant: United Microelectronics Corp.

Inventor： Neng-Hsing Shen ,  Chien-Wen Yang ,  Chun-Man Li ,  Ji-Fu Kung ,  Ching-Pei Lin

IPC: G06F19/00 ,  C23C14/54 ,  C23C14/48 ,  H01L21/66 ,  G06K9/00 ,  G05B15/02 ,  H01L21/265

Abstract: An apparatus for controlling an operation of a machine includes an optical recognition system, a control unit, and a remote control interface. The optical recognition system is configured to monitor and obtain actual operation information displayed on a panel of a processing machine in accordance with an operation time. The control unit is configured to receive the actual operation information and check the actual operation information with expected operation information. The expected operation information is obtained based on an operation model which is already built up corresponding to a current fabrication process. Deviation information between the actual operation information and the expected operation information is determined and converted into a parameter set. The remote control interface receives the parameter set and converts the parameter set into a control signal set to control the operation of the processing machine.

公开(公告)号：US20190276930A1

公开(公告)日：2019-09-12

申请号：US15950152

申请日：2018-04-10

Applicant: United Microelectronics Corp.

Inventor： Neng-Hsing Shen ,  Chien-Wen Yang ,  Chun-Man Li ,  Ji-Fu Kung ,  Ching-Pei Lin

IPC: C23C14/54 ,  C23C14/48 ,  H01L21/66 ,  G05B15/02 ,  G06K9/00

Abstract: An apparatus for controlling an operation of a machine includes an optical recognition system, a control unit, and a remote control interface. The optical recognition system is configured to monitor and obtain actual operation information displayed on a panel of a processing machine in accordance with an operation time. The control unit is configured to receive the actual operation information and check the actual operation information with expected operation information. The expected operation information is obtained based on an operation model which is already built up corresponding to a current fabrication process. Deviation information between the actual operation information and the expected operation information is determined and converted into a parameter set. The remote control interface receives the parameter set and converts the parameter set into a control signal set to control the operation of the processing machine.