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公开(公告)号：US20250028116A1
公开(公告)日：2025-01-23
申请号：US18454815
申请日：2023-08-24
Applicant: United Microelectronics Corp.
Inventor： Meng Ting Chiang , Kai-Kuang Ho , Shing-Ren Sheu
Abstract: A silicon photonics structure including a silicon photonics device is provided. The silicon photonics device includes a substrate and a waveguide. The substrate has a first side and a second side opposite to each other, and the waveguide is located on the first side. The width of the first side is greater than the width of the second side. The substrate includes a staircase structure.
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