公开(公告)号：US20230051210A1

公开(公告)日：2023-02-16

申请号：US17881794

申请日：2022-08-05

申请人： Yangtze Delta Region Institute (Huzhou), University of Electronic Science and Technology of China

发明人： Fan DONG ,  Ye HE ,  Qin REN ,  Yanjuan SUN ,  Jianping SHENG

IPC分类号： G01N24/10

摘要： Disclosed is an in-situ vacuum reaction system for dynamically detecting defects, which includes an electron paramagnetic resonance spectrometer, an in-situ vacuum reaction chamber, a gas supply unit, a vacuum unit, an illumination unit, a temperature control unit and a mixing bottle, the in-situ vacuum reaction chamber is arranged inside a detection cavity of the electron paramagnetic resonance spectrometer, the gas supply unit is connected to the mixing bottle through a pipeline, and the mixing bottle is connected to a gas inlet of the in-situ vacuum reaction chamber through a pipeline, the vacuum unit is connected to the gas inlet of the in-situ vacuum reaction chamber through a pipeline, the illumination unit is arranged corresponding to a detachable window of the electron paramagnetic resonance spectrometer, and the temperature control unit is connected to the electron paramagnetic resonance spectrometer through a pipeline.