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公开(公告)号:US20190154484A1
公开(公告)日:2019-05-23
申请号:US15759570
申请日:2016-09-23
申请人: Yoshihiro HASEKO , Yota YAMAMOTO
发明人: Yoshihiro HASEKO , Yota YAMAMOTO
摘要: A disclosed flow rate sensor (1) has a heat element (40) and a plurality of temperature detectors (30 through 33), and in a state in which the heat element (40) generates heat, a flow rate of a fluid flowing on the temperature detectors (30 through 33) is detected, based on temperature detection results of each of the temperature detectors (30 through 33). The flow rate sensor includes a semiconductor substrate having a frame shape with an opening, a diaphragm part (20) provided on the semiconductor substrate, and the heat element (40) and the plurality of temperature detectors (30 through 33) provided on the diaphragm part (20). The diaphragm part (20) has a thin film structure part (20t) that covers the opening, and in a plan view, the plurality of temperature detectors (30 through 33) are arranged in a periphery of the heat element (40).