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142 条记录 (耗时 0.035 秒)

    PROJECTION EXPOSURE SYSTEM FOR MICROLITHOGRAPHY AND METHOD OF MONITORING A LATERAL IMAGING STABILITY
    92.
    发明申请
    PROJECTION EXPOSURE SYSTEM FOR MICROLITHOGRAPHY AND METHOD OF MONITORING A LATERAL IMAGING STABILITY 有权
    用于微观计算的投影曝光系统和监测横向成像稳定性的方法

    公开(公告)号：US20110157571A1

    公开(公告)日：2011-06-30

    申请号：US12978103

    申请日：2010-12-23

    申请人： Matthias Manger ,  Armin Rauthe-Schoech ,  Ulrich Mueller

    发明人： Matthias Manger ,  Armin Rauthe-Schoech ,  Ulrich Mueller

    IPC分类号： G03B27/54

    CPC分类号： G03F7/70191 ,  G03F7/70258 ,  G03F7/70591 ,  G03F7/7085

    摘要： A projection exposure system (10) for microlithography. The system includes projection optics (12) configured to image mask structures into a substrate plane (16), an input diffraction element (28) which is configured to convert irradiated measurement radiation (21) into at least two test waves (30) directed onto the projection optics (12) with differing propagation directions, a detection diffraction element (34; 28) which is disposed in the optical path of the test waves (30) after the latter have passed through the projection optics (12) and is configured to produce a detection beam (36) from the test waves (30) which has a mixture of radiation portions of both test waves (30), a photo detector (38) disposed in the optical path of the detection beam (36) which is configured to record the radiation intensity of the detection beam (36), time resolved, and an evaluation unit which is configured to determine the lateral imaging stability of the projection optics (12) from the radiation intensity recorded.

    摘要翻译： 一种用于微光刻的投影曝光系统（10）。 该系统包括被配置成将掩模结构成像到衬底平面（16）中的投影光学器件（12），被配置为将照射的测量辐射（21）转换成至少两个测试波（30）的输入衍射元件（28） 具有不同传播方向的投影光学器件（12），检测衍射元件（34; 28），其被布置在经过投影光学器件（12）的测试波（30）的光路中，并被配置为 从具有两个测试波的辐射部分的混合物的测试波（30）产生检测光束（36），设置在检测光束（36）的光路中的光电检测器（38） 记录检测光束（36）的辐射强度，时间分辨率和被配置为根据记录的辐射强度确定投影光学器件（12）的横向成像稳定性的评估单元。

    PROCESS FOR INDUSTRIAL ISOLATION OF PROPENE
    93.
    发明申请
    PROCESS FOR INDUSTRIAL ISOLATION OF PROPENE 失效
    工业分离丙烯的方法

    公开(公告)号：US20110118526A1

    公开(公告)日：2011-05-19

    申请号：US13003839

    申请日：2009-07-17

    申请人： Markus Schubert ,  Ingo Richter ,  Ulrich Mueller ,  Frank Poplow ,  William Dolan ,  Christoph Kiener

    发明人： Markus Schubert ,  Ingo Richter ,  Ulrich Mueller ,  Frank Poplow ,  William Dolan ,  Christoph Kiener

    IPC分类号： C07C7/12

    CPC分类号： C07C7/12 ,  C07C11/06

    摘要： A process for the industrial isolation of propene from a gas stream comprising at least propene and propane, which involves contacting of the gas stream with an adsorbent having a porous metal organic framework having at least one at least bidentate organic compound coordinated to at least one metal ion, with the adsorbent becoming laden with propane and the gas stream therefore having an increased proportion of propene, wherein the W least bidentate organic compound is an imidazolate which is unsubstituted or has one or more substituents selected independently from of halogen, C1-6-alkyl, phenyl, NH2, NH(C1-6-alkyl), N(C1-6-alkyl)2, OH, O-phenyl and O—C1-6-alkyl.

    摘要翻译： 一种用于从包含至少丙烯和丙烷的气流中工业分离丙烯的方法，其包括使气流与具有多孔金属有机骨架的吸附剂接触，所述多孔金属有机骨架具有与至少一种金属配位的至少二齿有机化合物 离子，吸附剂变得装满丙烷，因此气流具有增加的丙烯比例，其中W最小二齿有机化合物是未被取代的或具有一个或多个独立地选自卤素，C 1-6 - 烷基，苯基，NH 2，NH（C 1-6 - 烷基），N（C 1-6 - 烷基）2，OH，O-苯基和O-C 1-6 - 烷基。

    Mesoporous metal-organic framework
    95.
    发明授权
    Mesoporous metal-organic framework 有权
    介孔金属 - 有机骨架

    公开(公告)号：US07842827B2

    公开(公告)日：2010-11-30

    申请号：US11996976

    申请日：2006-08-16

    申请人： Markus Schubert ,  Ulrich Mueller ,  Hendrick Mattenheimer ,  Markus Tonigold

    发明人： Markus Schubert ,  Ulrich Mueller ,  Hendrick Mattenheimer ,  Markus Tonigold

    IPC分类号： C07F5/06 ,  B01J33/00

    CPC分类号： C07F5/069 ,  C01B3/001 ,  C01B3/0015 ,  C01B3/0026 ,  C07C51/418 ,  Y02E60/327 ,  Y02E60/328 ,  C07C63/307

    摘要： The present invention relates to a porous metal-organic framework comprising AlIII and at least one at least bidentate compound, wherein the at least one at least bidentate organic compound is a six-membered aromatic hydrocarbon ring A in which one or more ring carbons may be replaced by nitrogen and which has three substituents X and optionally one or more substituents selected from the group consisting of R, NRR′, OR, SR, F, Cl and Br, where R, R′ are each, independently of one another, hydrogen, methyl which may optionally be substituted by one or more fluorine atoms or ethyl which may optionally be substituted by one or more fluorine atoms and each X is, independently of the others, C(═O)O−, C(═S)O−, C(═O)S−, C(═S)S− or a protonated form thereof. The invention further provides a process for preparing it and provides for the use of the new porous metal-organic framework.

    摘要翻译： 本发明涉及包含AlIII和至少一种至少二齿化合物的多孔金属 - 有机骨架，其中所述至少一种至少二齿的有机化合物是其中一个或多个环碳可以是六元芳烃环A 被氮取代，并且具有三个取代基X和任选的一个或多个选自R，NRR'，OR，SR，F，Cl和Br的取代基，其中R，R'彼此独立地为氢 可以任选被一个或多个氟原子取代的甲基或可任意被一个或多个氟原子取代的乙基，并且每个X独立地为C（= O）O-，C（= S）O - ，C（= O）S-，C（= S）S-或其质子化形式。 本发明还提供了一种制备该方法并提供了新的多孔金属 - 有机骨架的用途。