公开(公告)号：US4889998A

公开(公告)日：1989-12-26

申请号：US148691

申请日：1988-01-26

申请人： Fuminori Hayano ,  Kazunori Imamura ,  Sunao Murata ,  Kinya Kato

发明人： Fuminori Hayano ,  Kazunori Imamura ,  Sunao Murata ,  Kinya Kato

IPC分类号： G01N21/94 ,  G03F1/62 ,  G03F1/84

CPC分类号： G03F1/62 ,  G01N21/94 ,  G03F1/84 ,  G01N2021/4721

摘要： An apparatus for detecting foreign particles on a transparent pellicle comprises a first illuminating device having a first optical axis crossing a surface of the pellicle at a predetermined angle for supplying a light beam onto said transparent pellicle along said first optical axis and a second illuminating device having a second optical axis crossing the surface of said pellicle at an angle different from said predetermined angle for supplying a light beam to said transparent pellicle along said second optical axis. The apparatus further includes a detector for comparing quantity of light of a light beam scattered by a foreign particle and directed to a predetermined direction from said first illuminating device with quantity of light of a light beam scattered by the foreign particle and directed to a predetermined direction from said second illuminating device and for determining a surface of the transparent pellicle on which said foreign particle exists.

摘要翻译： 用于检测透明防护薄膜上的异物的装置包括：第一照明装置，具有以预定角度与防护薄膜组件的表面交叉的第一光轴，用于沿着所述第一光轴将光束提供到所述透明防护薄膜上;以及第二照明装置， 第二光轴以与所述预定角度不同的角度与所述防护薄膜组件的表面交叉，用于沿着所述第二光轴向所述透明防护薄膜组件提供光束。 该装置还包括一个检测器，用于比较由异物散射的光束的光量与来自所述第一照明装置的预定方向的光的量，该光量是由外来颗粒散射的光束的光量并且被引导到预定方向 并且用于确定存在所述外来颗粒的透明防护薄膜的表面。

公开(公告)号：US4744663A

公开(公告)日：1988-05-17

申请号：US808932

申请日：1985-12-13

申请人： Muneki Hamashima ,  Kinya Kato

发明人： Muneki Hamashima ,  Kinya Kato

IPC分类号： G03F7/20 ,  G01B11/00

CPC分类号： G03F7/70616 ,  G03F7/70625 ,  G03F7/70633

摘要： A pattern position detecting apparatus using a laser beam which is used for the recognition of an edge position, line width, etc., of a circuit pattern on a semiconductor wafer used in the fabrication of semiconductor devices. The apparatus includes an optical system for condensing a short-wave energy beam into a tiny spot and projecting it onto a sample, means for moving the sample and the spot relative to each other, first detecting means for receiving at least one of a reflection from a pattern and a scattering from a pattern edge, second detecting means for detecting a luminescence emitted from a pattern portion hit by the spot, and means for determining the position of the pattern in accordance with the detection information from the first and second detecting means and the scanning information of the spot.

摘要翻译： 使用激光束的图案位置检测装置，其用于识别用于制造半导体器件的半导体晶片上的电路图案的边缘位置，线宽等。 该装置包括用于将短波能量束聚集到微小斑点并将其投射到样品上的光学系统，用于相对于彼此移动样品和光点的装置，第一检测装置，用于接收来自 来自图案边缘的图案和散射;第二检测装置，用于检测由点击的图案部分发出的发光;以及装置，用于根据来自第一和第二检测装置的检测信息确定图案的位置;以及 现场的扫描信息。

公开(公告)号：US4690565A

公开(公告)日：1987-09-01

申请号：US711163

申请日：1985-03-13

申请人： Kinya Kato ,  Hiroyuki Tsuchiya

发明人： Kinya Kato ,  Hiroyuki Tsuchiya

IPC分类号： G01N21/47 ,  G01B11/00 ,  G01B11/02 ,  G01B11/24 ,  G01B11/245 ,  G01N21/88 ,  G01N21/956

CPC分类号： G01B11/00 ,  G01B11/028

摘要： An optical apparatus for the detection of scattered light has a light source for supplying a beam of light with a determined wavelength, an objective lens for focusing the light beam on a test object and a photo receptor for receiving the light scattered around the objective lens by the boundaries of a pattern on the test object. The apparatus further has a light converging ring member and a filter arranged in the optical path between the test object and the photo receptor to allow the scattered light from the test object to enter the filter and the photo receptor after the scattered light is converted into a beam of substantially collimated rays by the action of reflection and convergence by the converging ring member.

摘要翻译： 用于检测散射光的光学装置具有用于提供具有确定波长的光束的光源，用于将光束聚焦在测试对象上的物镜和用于接收通过物镜散射的光的光接收器 测试对象上的模式的边界。 该装置还具有聚光环构件和布置在被测物体与光接收体之间的光路中的滤光片，以允许来自被测物体的散射光进入滤光器，并将散射光的光接收体转换为 通过会聚环构件的反射和收敛的作用，基本上准直的射线的光束。

公开(公告)号：US4530578A

公开(公告)日：1985-07-23

申请号：US608820

申请日：1984-05-10

申请人： Kinya Kato

发明人： Kinya Kato

IPC分类号： A61B1/06 ,  G02B6/04 ,  G02B6/32 ,  G02B15/10 ,  G02B21/12 ,  G02B23/26 ,  G02B5/14

CPC分类号： G02B21/12 ,  G02B6/32

摘要： A variable magnification observation apparatus capable of changing the magnification thereof includes an optical fiber having an exit surface for emitting an illuminating light beam at an angle corresponding to a predetermined numerical aperture, an aperture stop member disposed near the exit surface of the optical fiber, a field stop member disposed at a predetermined distance from the aperture stop member, and a negative lens removably inserted in the optical path between the aperture stop member and the field stop member.

摘要翻译： 能够改变其倍率的可变倍率观察装置包括具有用于以与预定数值孔径对应的角度发射照明光束的出射面的光纤，设置在光纤出射面附近的孔径光阑部件， 设置在与孔径光阑构件相隔预定距离处的挡光板构件，以及可拆卸地插入到孔径光阑构件和场阻挡构件之间的光路中的负透镜。