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公开(公告)号：US20090022571A1
公开(公告)日：2009-01-22
申请号：US12175278
申请日：2008-07-17
CPC分类号： H02K41/03 , H01L21/67742 , H01L21/68707 , H02K2201/18
摘要： A substrate transport apparatus including a peripheral wall having an inner surface that defines a substrate transport chamber capable of holding an isolated atmosphere, at least one substantially ring shaped motor having at least one stator module located within the peripheral wall, between the inner surface and an adjacent outer surface of the peripheral wall and at least one rotor suspended substantially without contact within the transport chamber such that a surface of the peripheral wall encompassed by the ring shaped motor is configured for attachment thereto of a predetermined device and at least one substrate transport arm connected to the at least one rotor and having at least one end effector configured to hold at least one substrate.
摘要翻译： 一种基板输送装置，包括具有内表面的外周壁，该内表面限定能够保持隔离气氛的基板输送室，至少一个基本上环形的马达，其具有位于周壁内的至少一个定子模块，位于内表面和 所述周壁的相邻外表面和至少一个转子在所述输送室内基本上不接触地悬挂，使得由所述环形电机包围的所述周壁的表面构造成用于附接到预定装置和至少一个基板输送臂 连接到所述至少一个转子并且具有构造成保持至少一个基板的至少一个末端执行器。
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公开(公告)号：US20090001917A1
公开(公告)日：2009-01-01
申请号：US11769651
申请日：2007-06-27
IPC分类号： H02P31/00
CPC分类号： F16C32/0444 , F16C32/0493 , F16C2380/26
摘要： A method of commutating a motor includes operatively interfacing a stator and actuated component of the motor, arranging at least two winding sets relative to the actuated component, and independently controlling the at least two winding sets so that with the at least two winding sets the actuated component is both driven and centered.
摘要翻译： 一种换向电动机的方法包括操作地连接电动机的定子和致动部件，相对于致动部件布置至少两个绕组，并且独立地控制至少两个绕组组，使得至少两个绕组组被致动 组件都被驱动和集中。
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公开(公告)号：US6120229A
公开(公告)日：2000-09-19
申请号：US243516
申请日：1999-02-01
IPC分类号： B65G49/07 , H01L21/677 , H01L21/68
CPC分类号： H01L21/67772 , H01L21/67781 , Y10S414/137 , Y10S414/14
摘要： A semiconductor wafer batchloading system comprises a portable carrier for supporting and transporting wafers in a substantially particle free environment. A carrier door is movable between an open position and a closed position overlying a carrier port for sealing the interior of the carrier from the surrounding environment. The carrier is movable on a platform between withdrawn and advanced positions for delivering multiple wafers to a wafer receiving station. A plurality of spaced rack members support the wafers, each being aligned with an associated one of a plurality of spaced shelves on the wafer receiving station. The wafer receiving station may be located within a load lock defining a chamber having a substantially particle free environment and including a load lock port with a load lock door movable between a closed position overlying the load lock port and an open position spaced therefrom. A locking mechanism releasably locks the carrier door to the carrier. The carrier door drive mechanism includes a generally planar door opener movable between a lowered position and a raised position substantially coextensive with the carrier port. The door opener is also movable between a first position proximate the carrier port and a second position distant from the carrier port and a removal mechanism operates the locking mechanism to release the carrier door from the carrier port and supports the carrier door when the carrier door has been released from the carrier.
摘要翻译： 半导体晶片批量加载系统包括用于在基本上无颗粒环境中支撑和运输晶片的便携式载体。 托架门可以在打开位置和覆盖在承载口上的关闭位置之间移动，用于将承载件的内部与周围环境密封。 载体可在平台之间在撤回和高级位置之间移动，以将多个晶片传送到晶片接收站。 多个间隔开的齿条构件支撑晶片，每个晶片与晶片接收台上的多个间隔架中的相关联的一个对准。 晶片接收站可以位于限定具有基本上无颗粒环境的室的负载锁定中，并且包括负载锁定端口，负载锁定端口可在覆盖负载锁定端口的关闭位置和与其分开的打开位置之间移动。 锁定机构将承载门可释放地锁定到托架上。 行星门驱动机构包括大致平面的开门器，其可在下降位置和与承载口基本上共同延伸的升高位置之间移动。 门开启器还可以在靠近承载口的第一位置和远离承载口的第二位置之间移动，并且拆卸机构操作锁定机构以将承载门从承载口释放，并且当承载门具有 已从运营商释放。
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公开(公告)号：US5899658A
公开(公告)日：1999-05-04
申请号：US957141
申请日：1997-10-24
IPC分类号： B25J9/06 , B25J9/10 , B25J9/12 , B25J18/02 , B25J21/00 , H01L21/677 , H01L21/687 , H02K5/128 , H02K16/00 , H02K29/00
CPC分类号： H02K16/00 , B25J21/00 , B25J9/107 , B25J9/126 , H01L21/67742 , H01L21/68707 , H02K5/128
摘要： A concentric-shaft rotational drive system for an articulated arm transfer device adaptable for imparting movement to an assembly inside a vacuum chamber wherein rotary movement is imparted to rotors inside the vacuum chamber by means of magnetic fields produced by stators outside the vacuum chamber
摘要翻译： 一种用于铰接臂传送装置的同心轴旋转驱动系统，其适用于向真空室内的组件施加运动，其中通过真空室外的定子产生的磁场将旋转运动施加到真空室内的转子上
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