摘要:
A failure analysis tool, a method of using the tool and a design structure for designing a mask for protecting a critical area of wiring failure in a semiconductor chip during packaging is provided. The failure analysis tool includes a computer infrastructure operable to determine a risk area for wiring layer failure during solder bump formation by determining a distance from a center of a chip to a location for a solder bump processing and identifying an area at an edge of the location for the solder bump processes at a predetermined distance and greater from the center of the chip.
摘要:
A solder bump structure and method for forming the same. The structure includes (a) a dielectric layer including a dielectric layer top surface (b) an electrically conductive bond pad on and in direct physical contact with the dielectric layer top surface; (c) a patterned support/interface layer on the dielectric layer top surface and thicker than the electrically conductive bond pad in the reference direction, wherein the patterned support/interface layer includes a hole and a trench, wherein the hole is directly above the electrically conductive bond pad, and wherein the trench is not filled by any electrically conductive material; and (d) an electrically conductive solder bump filling the hole and electrically coupled to the electrically conductive bond pad.
摘要:
A wire bond pad and method of fabricating the wire bond pad. The method including: providing a substrate; forming an electrically conductive layer on a top surface of the substrate; patterning the conductive layer into a plurality of wire bond pads spaced apart; and forming a protective dielectric layer on the top surface of the substrate in spaces between adjacent wire bond pads, top surfaces of the dielectric layer in the spaces coplanar with coplanar top surfaces of the wire bond pads.
摘要:
A method of preventing the formation of cracks on the backside of a silicon (Si) semiconductor chip or wafer during the processing thereof. Also provided is a method for inhibiting the propagation of cracks, which have already formed in the backside of a silicon chip during the processing thereof and prior to the joining thereto of a substrate during the fabrication of an electronic package. The methods entail either treating the backside with a wet etch, or alternatively, applying a protective film layer thereon prior to forming an electronic package incorporating the chip or wafer.
摘要:
A solder bump structure and method for forming the same. The structure includes (a) a dielectric layer including a dielectric layer top surface (b) an electrically conducting bond pad on and in direct physical contact with the dielectric layer top surface; (c) a patterned support/interface layer on the dielectric layer top surface and thicker than the electrically conducting bond pad in the reference direction, wherein the patterned support/interface layer comprises a hole and a trench, wherein the hole is directly above the electrically conducting bond pad, and wherein the trench is not filled by any electrically conducting material; and (d) an electrically conducting solder bump filling the hole and electrically coupled to the electrically conducting bond pad.
摘要:
An electrical interconnection structure and method for forming. The electrical structure comprises a substrate comprising electrically conductive pads and a first dielectric layer over the substrate and the electrically conductive pads. The first dielectric layer comprises vias. A metallic layer is formed over the first dielectric layer and within the vias. A second dielectric layer is formed over the metallic layer. A ball limiting metallization layer is formed within the vias. A photoresist layer is formed over a surface of the ball limiting metallization layer. A first solder ball is formed within a first opening in the photoresist layer and a second solder ball is formed within a second opening in the photoresist layer.
摘要:
The present invention relates to a method for fabricating a semiconductor device with a last level copper-to-C4 connection that is essentially free of aluminum. Specifically, the last level copper-to-C4 connection comprises an interfacial cap structure containing CoWP, NiMoP, NiMoB, NiReP, NiWP, and combinations thereof. Preferably, the interfacial cap structure comprises at least one CoWP layer. Such a CoWP layer can be readily formed over a last level copper interconnect by a selective electroless plating process.
摘要:
A semiconductor structure and method for chip dicing. The method comprises the steps of (a) providing a semiconductor substrate; (b) forming first and second device regions of first and second chips, respectively, in and at top of the semiconductor substrate, wherein the first and second chips are separated by a semiconductor border region of the semiconductor substrate; (c) forming N interconnect layers directly above the semiconductor border region and the first and second device regions, wherein N is a positive integer, wherein each layer of the N interconnect layers comprises an etchable portion directly above the semiconductor border region, and wherein the etchable portions of the N interconnect layers form a continuous etchable block; (d) removing the continuous etchable block by etching; and (e) cutting with a laser through the semiconductor border region via an empty space of the removed continuous etchable block to separate the first and second chips.
摘要:
A fusible link for a semiconductor device comprises an insulating substrate and a conductive line pair on the surface of the insulating substrate, with the conductive line pair having spaced ends. A polymer is disposed over the insulating substrate and between the conductive line pair ends. The polymer is capable of being changed from a non-conductive to a conductive state upon exposure to an energy beam. Preferably, the polymer comprises a polyimide, more preferably, a polymer/onium salt mixture, most preferably, a polyaniline polymer doped with a triphenylsufonium salt. The link may further comprise a low &kgr; nanopore/nanofoam dielectric material adjacent the conductive line ends.
摘要:
A method of forming a fuse structure in which passivating material over the fuse has a controlled, substantially uniform thickness that is provided after C4 metallurgy formation. A laser fuse deletion process for the fuse formed by this method is also disclosed.