Automatic record playing apparatus
    91.
    发明授权
    Automatic record playing apparatus 失效
    自动录音机

    公开(公告)号:US4183538A

    公开(公告)日:1980-01-15

    申请号:US791595

    申请日:1977-04-27

    申请人: Takashi Saito

    发明人: Takashi Saito

    IPC分类号: G11B3/085 G11B17/06

    CPC分类号: G11B3/08545

    摘要: An automatic record playing apparatus comprises a rotating member adapted to rotate together with a tone arm and having a projection thereon, a rotation driving member rotated forward and backward over a predetermined range during a predetermined operational period by a rotating force of a turntable, and a pushing means provided on the rotation driving member and adapted to push the projection to rotate the rotating member for returning the tone arm unitarily therewith toward outside of a record disc as the rotation driving member effects initial forward rotation. The pushing means having a first portion for pushing the projection in one rotational direction of the rotating member, and a second portion for pushing elastically the projection in the direction other than the rotational direction of the rotating member. The rotating member being rotated in the result, that the projection is pushed by the first portion of the pushing means in a state where unnecessary revolution thereof is obstructed by the second portion.

    摘要翻译: 一种自动记录播放装置,包括旋转构件,其适于与调音臂一起旋转并且在其上具有突起,旋转驱动构件在预定操作时段期间通过转台的旋转力而在预定范围内向前和向后旋转,并且 推动装置,其设置在所述旋转驱动构件上,并且适于在所述旋转驱动构件进行初始正向旋转时推动所述突起以旋转所述旋转构件,以将所述音调臂一体地返回到记录盘的外部。 推动装置具有用于沿旋转构件的一个旋转方向推动突起的第一部分和用于沿除旋转构件的旋转方向以外的方向弹性地推动突起的第二部分。 旋转构件在结果中旋转,即在其不必要的旋转被第二部分阻挡的状态下,突起被推动装置的第一部分推动。

    Heating device, coating/developing system, heating method, coating/developing method, and recording medium having program for executing heating method or coating/developing method
    99.
    发明授权
    Heating device, coating/developing system, heating method, coating/developing method, and recording medium having program for executing heating method or coating/developing method 有权
    加热装置,涂布/显影系统,加热方法,涂布/显影方法和具有用于执行加热方法或涂布/显影方法的程序的记录介质

    公开(公告)号:US08927906B2

    公开(公告)日:2015-01-06

    申请号:US13018877

    申请日:2011-02-01

    CPC分类号: B05C21/00 G03F7/20 H05B3/20

    摘要: The disclosed heating device is to perform a heating process on an exposed substrate formed with a resist film before a developing process, the device including a heating part to perform a heating process on the exposed substrate, the heating part including a plurality of two-dimensionally arranged heating elements; a seating part provided at an upper side of the heating part, on which the substrate is disposed; and a control part to correct a setting temperature of the heating part based on temperature correction values, and to control the heating part based on the corrected setting temperature, during the heating process on one substrate by the heating part, wherein the temperature correction values being previously obtained from measured critical dimensions of the resist pattern in another substrate formed with the resist pattern through the heating process by the heating part and then the developing process.

    摘要翻译: 所公开的加热装置是在显影处理之前对形成有抗蚀剂膜的暴露的基板进行加热处理,该装置包括加热部分,以对暴露的基板进行加热处理,加热部分包括多个二维 布置加热元件; 设置在所述加热部的上侧的座部,所述基板设置在所述加热部的上侧; 以及控制部,其基于温度校正值校正加热部的设定温度,并且在由加热部在一个基板上的加热处理期间,基于校正的设定温度来控制加热部,其中,温度校正值为 先前由通过加热部分的加热处理形成的抗蚀剂图案的另一个衬底中的抗蚀剂图案的测量的临界尺寸获得,然后通过显影过程获得。