摘要:
A film quality inspecting method comprising applying a measuring beam having a specific wavelength to an annealed silicon film formed on a substrate in a direction inclined with respect to the silicon film, measuring a reflection intensity or reflectivity of a reflection beam reflected by the silicon film as a result of the application, and inspecting a film quality of the silicon film based on a measurement value obtained by the measurement.
摘要:
The present invention provides a high carbon steel wire remarkably excellent in wire-drawability and fatigue resistance after wire drawing with a low cost due to reduced use of costly alloys. A high carbon steel wire according to the present invention is one excellent in wire-drawability and fatigue resistance after wire drawing, characterized in that; the total oxygen content is 15 to 50 ppm; among non-metallic inclusions included therein, the number of inviscid inclusions is 1.5 pieces/mm2 or less in average under the visual field of an optical microscope; among the inviscid inclusions, the number of those having a composition falling within composition A specified below accounts for more than 20% and the total number of those having a composition falling within composition A or B specified below accounts for 80% or more; and the thickness of the inviscid inclusions having a composition falling within composition A specified below is 40 &mgr;m or less; composition A: containing over 70% of SiO2, composition B: containing 25 to 70% of SiO2, 8 to 30% of MnO, 40% or less of MgO, 35% or less of Al2O3, 25% or less of CaO and 6% or less of TiO2, and at least 5% of one or both of Al2O3 and MgO, and additionally at least 2% of one or both of CaO and TiO2.
摘要翻译:本发明提供一种高成本的钢丝,由于使用昂贵的合金而成本低,拉丝性和拉伸疲劳性优异。 根据本发明的高碳钢丝是拉丝后的拉丝性和耐疲劳性优异的特征,其特征在于: 总氧含量为15〜50ppm; 在其中包含的非金属夹杂物中,在光学显微镜的视场下,非粘性夹杂物的数量平均为1.5个/ mm 2以下; 在无粘连夹杂物中,具有以下规定的组成A内的成分的数量占20%以上,组成在下述A或B组成的组合的总数为80%以上; 具有下述组成A的组成的非粘性夹杂物的厚度为40μm以下; 组合物A:含有超过70%的SiO 2,组合物B:含有25〜70%的SiO 2,8〜30%的MnO,40%以下的MgO,35%以下的Al 2 O 3,25%以下的CaO和6 TiO 2的百分比或更少,以及Al 2 O 3和MgO中的至少5%,还有CaO和TiO 2中的一种或两种的至少2%。