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91.发明授权公开(公告)号：US09494878B2
公开(公告)日：2016-11-15
申请号：US14435315
申请日：2013-09-17
Applicant: ASML Netherlands B.V.
IPC: G03F7/20 , H02K41/035 , H02K16/00 , G02B7/182 , G02B26/08 , H01F7/02 , H02K49/10 , G02B5/08 , G02B19/00
CPC classification number: G03F7/70833 , G02B5/0891 , G02B7/1828 , G02B19/0023 , G02B26/0816 , G03F7/70116 , G03F7/7015 , G03F7/70825 , H01F7/0205 , H02K11/40 , H02K16/00 , H02K41/0352 , H02K41/0356 , H02K49/10
Abstract: An EUV optical apparatus includes a number of adjustable mirrors (22x) on mirror bodies (120). Each mirror body is supported on an actuator (100x) comprising a moving part (132, 134, 136) and a fixed casing part (128, 130). The actuator provides a resilient support (140, 142) for the mirror body so that it is tiltable with two degrees relative to the casing. An electromagnetic motor (166, 170-178) applies first part, under the influence of an applied motive force, the resilient mounting being arranged to provide a biasing force that resists said motive force. A magnetic coupling (102, 104a, 104b) is arranged between the moving and fixed parts so as to provide a counter-biasing force. The counter-biasing force partly opposes said biasing force and thereby reduces the motive force required to effect a given displacement. The actuator can thus be made with reduced size, weight and heat dissipation.
Abstract translation: EUV光学装置包括在镜体（120）上的多个可调镜（22x）。 每个镜体支撑在包括移动部件（132,134,136）和固定壳体部件（128,130）的致动器（100x）上。 致动器提供用于镜体的弹性支撑件（140,142），使得其相对于壳体可倾斜两度。 电磁马达（166,170-178）在施加的动力的作用下施加第一部分，所述弹性安装件设置成提供抵抗所述动力的偏置力。 磁性联轴器（102,104a，104b）设置在运动部件和固定部件之间，以提供反作用力。 反作用力部分地与所述偏压力相反，从而减小了实现给定位移所需的动力。 致动器因此可以减小尺寸，重量和散热。
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公开(公告)号：US20160320608A1
公开(公告)日：2016-11-03
申请号：US15210533
申请日：2016-07-14
Applicant: Carl Zeiss SMT GmbH
Inventor： Stefan Krone , Lars Berger
CPC classification number: G02B26/0816 , G02B7/1828 , G02B27/0012 , G03F7/70075 , G03F7/70116 , G03F7/702
Abstract: A method for displacing an optical component is disclosed, in which the electrical power maximally required when displacing the component is less than the sum of the maximum electrical powers of the at least two actuators used for the displacement.
Abstract translation: 公开了一种用于移动光学部件的方法，其中当移动部件时最大限度地需要的电功率小于用于位移的至少两个致动器的最大电功率的总和。
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公开(公告)号：US09448384B2
公开(公告)日：2016-09-20
申请号：US13903563
申请日：2013-05-28
Applicant: Carl Zeiss SMT GmbH
Inventor： Michael Erath , Florian Bach , Ulrich Schoenhoff , Rodolfo Rabe , Norbert Muehlberger , Dirk Eicher , Jasper Wesselingh
CPC classification number: G02B7/1828 , G02B3/00 , G02B5/08 , G02B7/023 , G03F7/70141 , G03F7/708 , G03F7/70825
Abstract: The invention relates to an arrangement for mounting an optical element, in particular in an EUV projection exposure apparatus, comprising a weight force compensation device for exerting a compensation force on the optical element, wherein the compensation force at least partly compensates for the weight force acting on the optical element, wherein the weight force compensation device has a passive magnetic circuit for generating a force component of the compensation force acting on the optical element, and wherein at least one adjustment element is provided via which the force component generated by the passive magnetic circuit is continuously adjustable.
Abstract translation: 本发明涉及一种用于安装光学元件的装置，特别是在EUV投影曝光装置中，包括用于对光学元件施加补偿力的重力补偿装置，其中补偿力至少部分地补偿作用的重量 在所述光学元件上，其中所述重力补偿装置具有用于产生作用在所述光学元件上的补偿力的力分量的无源磁路，并且其中提供至少一个调节元件，由所述被动磁体产生的力分量 电路连续可调。
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公开(公告)号：US09308866B2
公开(公告)日：2016-04-12
申请号：US13828002
申请日：2013-03-14
Applicant: Martin Palvoelgyi , Bernhard Schadler , Reinhard Fuchs
Inventor： Martin Palvoelgyi , Bernhard Schadler , Reinhard Fuchs
CPC classification number: B60R1/072 , B60R1/074 , B60R1/076 , G02B7/1828
Abstract: A system of exterior mirrors having a mirror head and a mirror foot, the system including a first mirror which is configured to rotate about and also move vertically along a first axis defined by a first drive for the first mirror, and a second mirror which is configured to rotate about a second axis defined by a second drive for the second mirror.
Abstract translation: 一种具有镜头和反射镜的外后视镜系统，该系统包括第一反射镜，该第一反射镜被构造成沿着由第一反射镜的第一驱动器限定的第一轴线周围旋转并且还垂直移动，第二反射镜是第二反射镜， 被配置为围绕由用于第二反射镜的第二驱动器限定的第二轴线旋转。
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95.发明申请
公开(公告)号：US20150198892A1
公开(公告)日：2015-07-16
申请号：US14670223
申请日：2015-03-26
Applicant: Carl Zeiss SMT GmbH
Inventor： Markus Hauf , Alexander Vogler
CPC classification number: G03F7/702 , G02B7/181 , G02B7/182 , G02B7/1828 , G02B26/0816 , G02B26/0833 , G03F7/70075 , G03F7/70116 , G03F7/70825
Abstract: The invention relates to an arrangement for actuating an element in an optical system, in particular an optical system of a projection exposure apparatus, wherein the optical element is tiltable about at least one tilting axis via at least one joint having a joint stiffness, comprising at least one actuator for exerting a force on the optical element, wherein the actuator has an actuator stiffness which at least partly compensates for the joint stiffness.
Abstract translation: 本发明涉及用于致动光学系统中的元件，特别是投影曝光设备的光学系统的装置，其中光学元件可通过至少一个具有关节刚度的关节围绕至少一个倾斜轴线倾斜，包括： 用于在光学元件上施加力的至少一个致动器，其中致动器具有至少部分地补偿关节刚度的致动器刚度。
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公开(公告)号：US20130314681A1
公开(公告)日：2013-11-28
申请号：US13903563
申请日：2013-05-28
Applicant: Carl Zeiss SMT GmbH
Inventor： Michael Erath , Florian Bach , Ulrich Schoenhoff , Rodolfo Rabe , Norbert Muehlberger , Dirk Eicher , Jasper Wesselingh
CPC classification number: G02B7/1828 , G02B3/00 , G02B5/08 , G02B7/023 , G03F7/70141 , G03F7/708 , G03F7/70825
Abstract: The invention relates to an arrangement for mounting an optical element, in particular in an EUV projection exposure apparatus, comprising a weight force compensation device (103) for exerting a compensation force on the optical element (101), wherein said compensation force at least partly compensates for the weight force acting on the optical element (101), wherein the weight force compensation device (103) has a passive magnetic circuit for generating a force component of the compensation force acting on the optical element (101), and wherein at least one adjustment element (880) is provided by means of which the force component generated by the passive magnetic circuit is continuously adjustable.
Abstract translation: 本发明涉及一种用于安装光学元件的装置，特别是在EUV投影曝光装置中，包括用于对光学元件（101）施加补偿力的重力补偿装置（103），其中所述补偿力至少部分地 补偿作用在光学元件（101）上的重量，其中重力补偿装置（103）具有用于产生作用在光学元件（101）上的补偿力的力分量的无源磁路，并且其中至少 提供一个调节元件（880），通过该调节元件，被动磁路产生的力分量可连续调节。
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公开(公告)号：US08542423B2
公开(公告)日：2013-09-24
申请号：US12811350
申请日：2009-01-08
Applicant: Mathieu J. Demers , Jean-Thomas Landry , Henry L. Buijs
Inventor： Mathieu J. Demers , Jean-Thomas Landry , Henry L. Buijs
IPC: G02B26/08
CPC classification number: G02B7/1828 , F16C11/12 , G01J3/02 , G01J3/0202 , G01J3/06 , G02B7/1821
Abstract: An optical scanning or positioning mechanism has a head on which optical components are mounted and an actuator coupled to the head to cause the head to move when the actuator is actuated. There are one or more sets of flexure bearings mounted in the mechanism. The flexure bearings have a restoring torque when moved from a rest position. The bearings are coupled to the head to allow the head to move when actuated by the actuator. One or more magnets are mounted in the mechanism in a location other than in the actuator to compensate for the flexure bearings restoring torque.
Abstract translation: 光学扫描或定位机构具有安装有光学部件的头部和联接到头部的致动器，以在致动器致动时使头部移动。 安装在机构中的一组或多组挠性轴承。 当从静止位置移动时，挠曲轴承具有恢复扭矩。 轴承联接到头部，以允许头部由致动器致动时移动。 一个或多个磁体安装在机构中除了致动器之外的位置以补偿挠曲轴承恢复转矩。
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公开(公告)号：US07705493B2
公开(公告)日：2010-04-27
申请号：US12221369
申请日：2008-08-01
Applicant: Ron van Os
Inventor： Ron van Os
IPC: H02K33/00
CPC classification number: G02B7/1828 , G02B7/181 , H02K41/0356
Abstract: The invention claimed is a novel magnetic mirror air bearing for a Michelson interferometer with lateral motion. A precise kinematic mount is used in combination with magnetic fields wherein current can be applied on a centerline to move a piston and mirror laterally without pitch and yaw so as to effect accurate light beam reflection regardless of distance of lateral movement within a defined space. The assembly is able to operate across extended temperature ranges by utilizing materials which expand and contract at similar rates, and contains a thermalizing cavity which will thermalize the gas to avoid temperature induced artifacts.
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公开(公告)号：US07286273B2
公开(公告)日：2007-10-23
申请号：US10471041
申请日：2002-11-18
Applicant: Tetsuo Ikegame
Inventor： Tetsuo Ikegame
IPC: G02B26/08
CPC classification number: G02B6/359 , G02B6/3512 , G02B6/3582 , G02B7/182 , G02B7/1821 , G02B7/1828 , G02B26/0816 , G11B7/00
Abstract: An object of the present invention is to provide an optical deflecting device capable of suppressing undesirable vibrations of an optical deflecting element such as a mirror and allowing a plurality of optical deflecting elements to be easily arranged. The optical deflecting device is characterized in that the device has: a moving body 21 having at least two optical deflecting elements 1,31 held to face each other; supporting means having a first supporting member 32 pivot-connected to the moving body 21 between the two optical deflecting elements 1,31, so as to support the moving body 21 to a stationary body 22 such that the moving body 21 is tiltable around at least a first axis; and first driving means 26, 27, 41, 43 for driving the moving body 21 around the first axis.
Abstract translation: 本发明的目的是提供一种光学偏转装置，其能够抑制诸如反射镜的光学偏转元件的不期望的振动，并且允许容易地布置多个光学偏转元件。 光学偏转装置的特征在于，该装置具有：具有至少两个光学偏转元件1,31的移动体21，所述至少两个光学偏转元件1,31彼此相对地保持; 支撑装置具有第一支撑构件32，该第一支撑构件32在两个光学偏转元件1,31之间枢转连接到移动体21，以便将移动体21支撑到静止体22，使得移动体21至少可倾斜 第一轴; 以及用于围绕第一轴线驱动移动体21的第一驱动装置26,27,41,43。
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公开(公告)号：US07129601B2
公开(公告)日：2006-10-31
申请号：US10075940
申请日：2002-02-13
Applicant: David C. Brown , Felix Stukalin , Michael B. Nussbaum , Kurt Pelsue
Inventor： David C. Brown , Felix Stukalin , Michael B. Nussbaum , Kurt Pelsue
IPC: H02K41/00
CPC classification number: G02B6/3572 , G02B6/3518 , G02B6/3556 , G02B6/359 , G02B7/1828 , G02B26/0816 , G02B26/105
Abstract: A method and apparatus for supporting a movable member (10) with respect to a fixed member (40) is provided. The movable member (10) includes a magnetically permeable portion (81) contained therein and magnetic element (50) fixedly attached thereto and movable therewith. The movable member (10) is supported for rotation with respect to the fixed member (40) by an outer bearing surface (11) of the movable member and an inner bearing surface (20) of the fixed member (40). The fixed member (40) provides access to the movable member (10) from two sides thereof. A magnetically permeable stator element (70) is fixedly attached to the fixed member (40) and positioned within a magnetic flux field of the magnetic element (50) such that an air gap (73) is formed between the magnetic element (50) and the stator element (70). Accordingly a magnetic traction force acts across the air gap (73) for urging the moveable member (10) toward the fixed member (40) thereby clamping the movable element in a fixed orientation with respect to the movable element. The stator element (70) includes stator current coils (60) wound onto portions of the stator element for inducing electromagnetic forces within the stator element in response to a current passing through the coils. The electromagnetic force acts on the magnetic element (50) to move the movable member (10) in a controllable manner.
Abstract translation: 提供了一种用于相对于固定构件（40）支撑可移动构件（10）的方法和装置。 可移动部件（10）包括容纳在其中的导磁部分（81）和固定地附接到其上的可移动的磁性元件（50）。 可动构件（10）通过可动构件的外侧支承面（11）与固定构件（40）的内侧支承面（20）相对于固定构件（40）支承。 固定构件（40）从其两侧提供对可动构件（10）的通路。 导磁定子元件（70）固定地附接到固定构件（40）上并定位在磁性元件（50）的磁通场内，使得在磁性元件（50）和 定子元件（70）。 因此，磁力牵引力作用在空气间隙（73）上，用于将可移动构件（10）推向固定构件（40），从而将可移动元件相对于可移动元件夹紧在固定方向。 定子元件（70）包括缠绕在定子元件的部分上的定子电流线圈（60），用于响应于通过线圈的电流在定子元件内感应电磁力。 电磁力作用在磁性元件（50）上，以可控制的方式移动可动件（10）。
