SUBSTRATE DEVELOPING METHOD AND DEVELOPING APPARATUS
    121.
    发明申请
    SUBSTRATE DEVELOPING METHOD AND DEVELOPING APPARATUS 有权
    基板开发方法和开发设备

    公开(公告)号:US20080203058A1

    公开(公告)日:2008-08-28

    申请号:US12032582

    申请日:2008-02-15

    IPC分类号: B44C1/22 C23F1/00

    CPC分类号: G03F7/32 G03F7/3021

    摘要: A method for developing a substrate includes a developing step for supplying a developer to the substrate, and a neutralizing and removing step for supplying a treating solution containing a neutralizing material to the substrate to neutralize the developer, and neutralizing the developer and removing the developer from the substrate. In the neutralizing and removing step, the developer is neutralized by the treating solution. This neutralization reaction forms a product (salt) which easily melts into the treating solution and does not precipitate. Thus, the product is removable from the substrate along with the treating solution. Therefore, the developer is inhibited from remaining on the substrate. As a result, it is possible to prevent post-develop defects due to “residues of the developer” or the developer remaining on the substrate.

    摘要翻译: 用于显影衬底的方法包括将显影剂供应到衬底的显影步骤,以及用于将含有中和材料的处理溶液供应到衬底以中和显影剂并中和显影剂并除去显影剂的中和和去除步骤 底物。 在中和除去步骤中,显影剂被处理溶液中和。 该中和反应形成易于熔融进入处理溶液并且不沉淀的产物(盐)。 因此,产品与处理溶液一起可从基底中除去。 因此,抑制显影剂残留在基板上。 结果,可以防止由于“残留显影剂”或残留在基材上的显影剂引起的显影后缺陷。

    Image detection and readout apparatus having multiple readout regions
    123.
    发明授权
    Image detection and readout apparatus having multiple readout regions 失效
    具有多个读出区域的图像检测和读出装置

    公开(公告)号:US07414256B2

    公开(公告)日:2008-08-19

    申请号:US11366550

    申请日:2006-03-03

    申请人: Akira Yamaguchi

    发明人: Akira Yamaguchi

    IPC分类号: G01T1/24

    摘要: An image detection and readout apparatus constituted by a solid state detector constructed to generate electrical currents according to the electrostatic latent image when scanned by readout light, a surface light source for scanning the solid state radiation detector by the readout light, and a light source control means for controlling the surface light source. The stripe electrode of the solid state detector is divided into two sections at the center in the length direction of the elements of the stripe electrode to form two readout regions in order to reduce the capacitance component between the adjacent elements, as well as the resistance component of the elements. In addition, the light source control means is configured to control the surface light source to cause the scanning to be performed by the surface light source in parallel simultaneously for the readout regions.

    摘要翻译: 一种由固体检测器构成的图像检测和读出装置,其被构造成当通过读出光扫描时根据静电潜像产生电流;用于通过读出光扫描固态放射线检测器的表面光源;以及光源控制 用于控制表面光源的装置。 固态检测器的条状电极在条状电极的元件的长度方向的中心被分成两部分,以形成两个读出区域,以便减小相邻元件之间的电容分量,以及电阻分量 的元素。 此外,光源控制装置被配置为控制表面光源,以使得对于读出区域同时并行地对面光源执行扫描。

    Method and apparatus for rinsing a substrate during lithographic development processing
    125.
    发明申请
    Method and apparatus for rinsing a substrate during lithographic development processing 审中-公开
    用于在光刻显影处理期间漂洗基底的方法和装置

    公开(公告)号:US20080090185A1

    公开(公告)日:2008-04-17

    申请号:US11906748

    申请日:2007-10-02

    IPC分类号: G03F7/26

    CPC分类号: G03F7/3021

    摘要: The invention provides a method capable of eliminating occurrence of concentration difference in developer depending on position on a substrate surface when a developer on the substrate is replaced with a rinse; preventing occurrence of stain-like defects on a resist film surface; and reducing amount used of the developer. While a substrate is being rotated about a vertical axis by a rotation motor with held in a horizontal posture by a spin chuck, after the developer has been fed onto the resist film on the substrate surface from a developer discharge nozzle to conduct processing, the substrate continues to be rotated and thus the developer on the resist film is dispersed by a centrifugal force to be removed, and thereafter a rinse is fed onto the resist film from a rinse discharge nozzle to conduct rinsing.

    摘要翻译: 本发明提供一种能够消除显影剂中当基板表面上的显影剂被冲洗更换时基板表面上的位置的出现的方法; 防止抗蚀剂膜表面上出现斑点状缺陷; 并减少显影剂的使用量。 当通过由旋转卡盘保持水平姿态的旋转马达围绕垂直轴线旋转基板时,在显影剂从显影剂排出喷嘴被供给到基板表面上的抗蚀剂膜上以进行处理之后,基板 继续旋转,因此抗蚀剂膜上的显影剂通过离心力分散以除去,然后将冲洗液从冲洗排出喷嘴供给到抗蚀剂膜上以进行漂洗。

    Cognitive Function Training Unit
    126.
    发明申请
    Cognitive Function Training Unit 有权
    认知功能训练单位

    公开(公告)号:US20080027352A1

    公开(公告)日:2008-01-31

    申请号:US11596988

    申请日:2005-05-25

    IPC分类号: A61B3/02

    CPC分类号: A61H5/00 A61B5/16

    摘要: This cognitive function training unit comprises an eye-target showing means for showing a movable eye-target on a display disposed in front of the subject's eye, an eye movement measuring means for measuring a position and/or movement of the subject's eye, and a judgment means for judging whether the subject can fixedly look at or follow the eye-target based on the position and/or the movement of the eye-target shown on the display and the position and/or the movement of the subject's eye measured by the eye movement measuring means, and the eye-target showing means shows the eye-target repeatedly while changing the position and/or the movement of the eye-target according to a judgment result of the judgment means. Therefore, it is possible to show a suitable eye-target according to a symptom of a patient, whereby it is possible to conduct training efficiently

    摘要翻译: 该认知功能训练单元包括:目标显示用于在被检眼的前方设置的显示器上显示可动眼目的装置,用于测量被检眼的位置和/或移动的眼动检测单元, 判断装置,用于基于显示器上显示的眼睛目标的位置和/或运动以及由该显示器上显示的目标的眼睛的位置和/或运动来判断对象是否可以固定地观看或跟随目标对象 眼睛运动测量装置,并且眼睛目标显示装置根据判断装置的判断结果改变眼睛目标的位置和/或运动,反复显示目标目标。 因此,可以根据患者的症状来显示合适的眼睛目标,从而可以有效地进行训练

    Laminated electronic component
    128.
    发明申请

    公开(公告)号:US20070025054A1

    公开(公告)日:2007-02-01

    申请号:US11491282

    申请日:2006-07-24

    IPC分类号: H01G4/005

    CPC分类号: H01G4/30 H01G4/012

    摘要: A laminated electronic component includes a ceramic body having an inner portion and a pair of outer portions disposed above and below the inner portion and a pair of external electrodes disposed on lateral sides of the ceramic body. A plurality of internal electrodes are embedded in the inner portion and alternately connected to the external electrodes. At least two layers of dummy electrodes are embedded in at least one of the outer portions and each connected to one of the external electrodes. An innermost one of the dummy electrodes has a same polarity as an adjacent outermost one of the internal electrodes. The dummy electrodes include at least one pair of adjacent dummy electrodes of opposite polarities.

    Image recording apparatus
    129.
    发明授权
    Image recording apparatus 有权
    图像记录装置

    公开(公告)号:US07167271B1

    公开(公告)日:2007-01-23

    申请号:US09572460

    申请日:2000-05-17

    申请人: Akira Yamaguchi

    发明人: Akira Yamaguchi

    摘要: The image recording apparatus has a sharpness correcting device which performs a sharpness correction process on image data supplied from a medical diagnostic image generating apparatus, an electronic scaling device which performs an electronic magnification process of integral multiple on the image data from the sharpness correcting device and an outputting device which performs image recording with recording pixel density which is an integral multiple of the reading pixel density in the medical diagnostic image generating apparatus using the image data processed in the electronic scaling device and then outputs a hardcopy by performing a dry process. The apparatus is capable of outputting the medical diagnostic image which has high sharpness and high quality as well as the size equal to that of the affected areas part by utilizing a dry printer that is easy to perform the processing such as the development and the maintenance.

    摘要翻译: 图像记录装置具有锐度校正装置,其对从医疗诊断图像生成装置提供的图像数据进行锐度校正处理,对来自锐度校正装置的图像数据执行整数倍的电子倍率处理的电子缩放装置,以及 输出装置,其使用在电子缩放装置中处理的图像数据,以医疗诊断图像生成装置中的读取像素密度的整数倍的记录像素密度进行图像记录,然后通过进行干燥处理来输出硬拷贝。 该装置能够通过利用易于进行诸如开发和维护的处理的干式打印机,输出具有高清晰度和高质量的医疗诊断图像以及与受影响区域部分相同的尺寸。

    Multilayer electronic component and multilayer ceramic capacitor
    130.
    发明申请
    Multilayer electronic component and multilayer ceramic capacitor 审中-公开
    多层电子元件和多层陶瓷电容器

    公开(公告)号:US20060285274A1

    公开(公告)日:2006-12-21

    申请号:US11443006

    申请日:2006-05-31

    IPC分类号: H01G4/20 H01G4/06

    CPC分类号: H01G4/30 H01G4/129

    摘要: A multilayer electronic component comprises an inner multilayer portion and a pair of outer multilayer portions. The inner multilayer portion includes a plurality of first ceramic layers and a plurality of internal circuit element conductors which are alternately laminated and contain a glass component. A component amount ratio of an amount of the glass component in the second ceramic layers to an amount of a principal component of the second ceramic layers is larger than a component amount ratio of an amount of the glass component in the first ceramic layers to an amount of a principal component of the first ceramic layers.

    摘要翻译: 多层电子部件包括内部多层部分和一对外部多层部分。 内部多层部分包括多个第一陶瓷层和多个内部电路元件导体,其交替地层叠并容纳玻璃部件。 第二陶瓷层中的玻璃成分的量与第二陶瓷层的主成分量的成分量比大于第一陶瓷层中的玻璃成分量与成分量的比例 的第一陶瓷层的主要成分。