公开(公告)号：US5782942A

公开(公告)日：1998-07-21

申请号：US585065

申请日：1996-01-11

Applicant: Wen-Kai Wu

Inventor： Wen-Kai Wu

IPC: B01D46/00 ,  B01D46/04 ,  B01D46/24

CPC classification number: B01D46/0058 ,  B01D46/002 ,  B01D46/008 ,  Y10S438/909

Abstract: An improved filter system, particularly for the furnaces of a semiconductor manufacturing plant, has a standby filter and a piping system for connecting it momentarily in parallel with a normally used filter of one of the furnaces. A system of valves permits the normal filter to be isolated from its furnace so that it can be allowed to cool and then removed and replaced. The filter system avoids the problem that a standby filter is otherwise required for each furnace or that the replacement can not be made at a convenient time.

Abstract translation: 改进的过滤系统，特别是用于半导体制造工厂的炉子，具有备用过滤器和管道系统，用于与其中一个炉子的常用过滤器暂时并联连接。 阀门系统允许将普通过滤器从其炉中隔离，使得其可以被冷却，然后被去除和更换。 过滤器系统避免了每个炉子需要备用过滤器或者在方便的时间不能进行更换的问题。