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11.发明申请THIN FILM DEPOSITION APPARATUS AND METHOD OF MANUFACTURING ORGANIC LIGHT-EMITTING DISPLAY DEVICE BY USING THE SAME 审中-公开薄膜沉积装置及使用其制造有机发光显示装置的方法公开(公告)号：US20110052795A1
公开(公告)日：2011-03-03
申请号：US12873556
申请日：2010-09-01
申请人： Young-Mook CHOI , Chang-Mog Jo , Hee-Cheol Kang , Young-Sup Choi , Yun-Ml Lee
发明人： Young-Mook CHOI , Chang-Mog Jo , Hee-Cheol Kang , Young-Sup Choi , Yun-Ml Lee
IPC分类号： C23C16/04 , C23C16/44 , C23C16/458
CPC分类号： C23C14/042 , C23C14/12 , C23C14/243 , C23C14/50
摘要： A thin film deposition apparatus includes an electrostatic chuck that fixes a substrate on which a deposition material is to be deposited; a blocking member disposed at a side of the substrate fixed on the electrostatic chuck and covering at least a portion of the substrate; and a deposition unit including a chamber and a thin film deposition assembly disposed in the chamber and to deposit a thin film on the substrate fixed on the electrostatic chuck.
摘要翻译： 薄膜沉积装置包括：静电卡盘，其固定要沉积沉积材料的基板; 阻挡构件，其设置在所述基板的固定在所述静电卡盘上并覆盖所述基板的至少一部分的一侧; 以及沉积单元，其包括设置在所述室中的室和薄膜沉积组件，并且在固定在所述静电卡盘上的所述基板上沉积薄膜。
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12.发明申请公开(公告)号：US20110033964A1
公开(公告)日：2011-02-10
申请号：US12849193
申请日：2010-08-03
申请人： Ji-Sook OH , Yong-Sup Choi , Jong-Heon Kim , Hee-Cheol Kang , Yun-Mi Lee , Chang-Mog Jo
发明人： Ji-Sook OH , Yong-Sup Choi , Jong-Heon Kim , Hee-Cheol Kang , Yun-Mi Lee , Chang-Mog Jo
IPC分类号： H01L21/20
CPC分类号： H01L51/001 , C23C14/042 , C23C14/12 , C23C14/243 , H01L27/3211 , H01L51/0011 , H01L51/56
摘要： A thin film deposition apparatus and a method of manufacturing an organic light-emitting display device using the thin film deposition apparatus. The thin film deposition apparatus includes a plurality of thin film deposition assemblies, each of which includes: a deposition source that discharges a deposition material; a deposition source nozzle unit that is disposed at a side of the deposition source and includes a plurality of deposition source nozzles; a patterning slit sheet that is disposed opposite to the deposition source nozzle unit and includes a plurality of patterning slits arranged in a first direction; and a barrier plate assembly that is disposed between the deposition source nozzle unit and the patterning slit sheet, in the first direction. The barrier plate assembly includes a plurality of barrier plates that partition a space between the deposition source nozzle unit and the patterning slit sheet into a plurality of sub-deposition spaces.
摘要翻译： 一种薄膜沉积设备和使用该薄膜沉积设备制造有机发光显示设备的方法。 薄膜沉积设备包括多个薄膜沉积组件，每个薄膜沉积组件包括：沉积源，其沉积沉积材料; 沉积源喷嘴单元，其设置在所述沉积源的一侧并且包括多个沉积源喷嘴; 图案化缝隙片，其与所述沉积源喷嘴单元相对地设置并且包括沿第一方向布置的多个图案化狭缝; 以及在第一方向上设置在沉积源喷嘴单元和图案化缝隙片之间的阻挡板组件。 阻挡板组件包括将沉积源喷嘴单元和图案化缝隙片之间的空间分隔成多个次沉积空间的多个阻挡板。
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公开(公告)号：US10246769B2
公开(公告)日：2019-04-02
申请号：US12979656
申请日：2010-12-28
申请人： Hyun-Sook Park , Chang-Mog Jo , Hee-Cheol Kang , Yun-Mi Lee , Un-Cheol Sung , Yong-Sup Choi , Jong-Heon Kim , Jae-Kwang Ryu
发明人： Hyun-Sook Park , Chang-Mog Jo , Hee-Cheol Kang , Yun-Mi Lee , Un-Cheol Sung , Yong-Sup Choi , Jong-Heon Kim , Jae-Kwang Ryu
摘要： A thin film deposition apparatus that can be simply applied to produce large-sized display devices on a mass scale and that improves manufacturing yield. The thin film deposition apparatus includes a deposition source that discharges a deposition material; a deposition source nozzle unit disposed at a side of the deposition source and including a plurality of deposition source nozzles arranged in a first direction; and a patterning slit sheet disposed opposite to the deposition source nozzle unit and including a plurality of patterning slits arranged in a second direction that is perpendicular to the first direction. A deposition is performed while the substrate or the thin film deposition apparatus moves relative to each other in the first direction, and the deposition source, the deposition source nozzle unit, and the patterning slit sheet are formed integrally with each other.
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公开(公告)号：US08876975B2
公开(公告)日：2014-11-04
申请号：US12907396
申请日：2010-10-19
申请人： Yong-Sup Choi , Kang-ll Lee , Chang Mog Jo
发明人： Yong-Sup Choi , Kang-ll Lee , Chang Mog Jo
IPC分类号： C23C14/02 , C23C14/24 , C23C16/04 , C23C16/448 , C23C16/455 , H01L21/02 , C23C14/04 , C23C14/12 , C23C14/56
CPC分类号： H01L21/02107 , C23C14/04 , C23C14/044 , C23C14/12 , C23C14/24 , C23C14/243 , C23C14/564 , C23C16/04 , C23C16/042 , C23C16/448 , C23C16/4485 , C23C16/45563
摘要： A thin film deposition apparatus can be simply applied to produce large-sized display devices on a mass scale and improves manufacturing yield. The thin film deposition apparatus for forming a thin film on a substrate includes: a deposition source that discharges a deposition material; a deposition source nozzle unit disposed at a side of the deposition source and including a plurality of deposition source nozzles arranged in a first direction; and a patterning slit sheet disposed opposite to the deposition source nozzle unit and including a plurality of patterning slits arranged in the first direction; wherein each of the patterning slits includes a plurality of sub-slits.
摘要翻译： 薄膜沉积装置可以简单地应用于大规模生产大尺寸显示装置并提高制造成品率。 用于在基板上形成薄膜的薄膜沉积装置包括：放电沉积材料的沉积源; 沉积源喷嘴单元，设置在沉积源的一侧，并且包括沿第一方向布置的多个沉积源喷嘴; 以及图案化缝隙片，与所述沉积源喷嘴单元相对设置并且包括沿所述第一方向布置的多个图案化狭缝; 其中每个图案化缝隙包括多个子狭缝。
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15.发明授权公开(公告)号：US08709161B2
公开(公告)日：2014-04-29
申请号：US12849193
申请日：2010-08-03
申请人： Ji-Sook Oh , Yong-Sup Choi , Jong-Heon Kim , Hee-Cheol Kang , Yun-Mi Lee , Chang-Mog Jo
发明人： Ji-Sook Oh , Yong-Sup Choi , Jong-Heon Kim , Hee-Cheol Kang , Yun-Mi Lee , Chang-Mog Jo
IPC分类号： C23C16/00
CPC分类号： H01L51/001 , C23C14/042 , C23C14/12 , C23C14/243 , H01L27/3211 , H01L51/0011 , H01L51/56
摘要： A thin film deposition apparatus and a method of manufacturing an organic light-emitting display device using the thin film deposition apparatus. The thin film deposition apparatus includes a plurality of thin film deposition assemblies, each of which includes: a deposition source that discharges a deposition material; a deposition source nozzle unit that is disposed at a side of the deposition source and includes a plurality of deposition source nozzles; a patterning slit sheet that is disposed opposite to the deposition source nozzle unit and includes a plurality of patterning slits arranged in a first direction; and a barrier plate assembly that is disposed between the deposition source nozzle unit and the patterning slit sheet, in the first direction. The barrier plate assembly includes a plurality of barrier plates that partition a space between the deposition source nozzle unit and the patterning slit sheet into a plurality of sub-deposition spaces.
摘要翻译： 一种薄膜沉积设备和使用该薄膜沉积设备制造有机发光显示设备的方法。 薄膜沉积设备包括多个薄膜沉积组件，每个薄膜沉积组件包括：沉积源，其沉积沉积材料; 沉积源喷嘴单元，其设置在所述沉积源的一侧并且包括多个沉积源喷嘴; 图案化缝隙片，其与所述沉积源喷嘴单元相对地设置并且包括沿第一方向布置的多个图案化狭缝; 以及在第一方向上设置在沉积源喷嘴单元和图案化缝隙片之间的阻挡板组件。 阻挡板组件包括将沉积源喷嘴单元和图案化缝隙片之间的空间分隔成多个次沉积空间的多个阻挡板。
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公开(公告)号：US08696815B2
公开(公告)日：2014-04-15
申请号：US12873689
申请日：2010-09-01
申请人： Young-Mook Choi , Chang-Mog Jo , Hee-Cheol Kang , Hyun-Sook Park
发明人： Young-Mook Choi , Chang-Mog Jo , Hee-Cheol Kang , Hyun-Sook Park
IPC分类号： C23C16/00
CPC分类号： C23C16/52 , C23C14/042 , C23C14/12 , C23C14/243 , H01L51/0011 , H01L51/56
摘要： A thin film deposition apparatus that forms a thin film on a substrate includes: a deposition source that discharges a deposition material; a deposition source nozzle unit that is disposed at a side of the deposition source and includes a plurality of deposition source nozzles; a patterning slit sheet that is disposed opposite to the deposition source nozzle unit and includes a plurality of patterning slits; and a blocking member that is disposed between the substrate and the deposition source, wherein the thin film deposition apparatus is separated from the substrate by a predetermined distance, the substrate is moved relative to the thin film deposition apparatus, and the blocking member is moved along with the substrate to screen at least one portion of the substrate.
摘要翻译： 在衬底上形成薄膜的薄膜沉积装置包括：放电沉积材料的沉积源; 沉积源喷嘴单元，其设置在所述沉积源的一侧并且包括多个沉积源喷嘴; 图案化缝隙片，其与所述沉积源喷嘴单元相对设置并且包括多个图案化缝隙; 以及设置在所述基板和所述沉积源之间的阻挡构件，其中所述薄膜沉积设备与所述基板分离预定距离，所述基板相对于所述薄膜沉积设备移动，并且所述阻挡构件沿着 其中所述衬底筛选所述衬底的至少一部分。
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17.发明申请公开(公告)号：US20110168986A1
公开(公告)日：2011-07-14
申请号：US12987569
申请日：2011-01-10
申请人： Yun-Mi Lee , Sang-Soo Kim , Chang Mog Jo , Hyun-Sook Park
发明人： Yun-Mi Lee , Sang-Soo Kim , Chang Mog Jo , Hyun-Sook Park
CPC分类号： H01L51/001 , C23C14/042 , C23C14/243 , C23C14/568 , H01L51/0011 , H01L51/56
摘要： A thin film deposition apparatus, a method of manufacturing an organic light-emitting display device by using the thin film deposition apparatus, and an organic light-emitting display device manufactured by using the method. The thin film deposition apparatus includes: a deposition source that discharges a deposition material; a deposition source nozzle unit disposed at a side of the deposition source and including a plurality of deposition source nozzles arranged in a first direction; a patterning slit sheet disposed opposite to the deposition source nozzle unit and including a plurality of patterning slits having different lengths arranged in the first direction; and a barrier plate assembly disposed between the deposition source nozzle unit and the patterning slit sheet in the first direction, and including a plurality of barrier plates that partition a space between the deposition source nozzle unit and the patterning slit sheet into a plurality of sub-deposition spaces, wherein the thin film deposition apparatus is separated from the substrate by a predetermined distance, and the thin film deposition apparatus and the substrate are movable relative to each other.
摘要翻译： 薄膜沉积装置，使用薄膜沉积装置制造有机发光显示装置的方法以及使用该方法制造的有机发光显示装置。 薄膜沉积设备包括：放电沉积材料的沉积源; 沉积源喷嘴单元，设置在沉积源的一侧，并且包括沿第一方向布置的多个沉积源喷嘴; 图案化缝隙片，与所述沉积源喷嘴单元相对设置并且包括沿所述第一方向布置的具有不同长度的多个图案化缝隙; 以及阻挡板组件，其在所述第一方向上设置在所述沉积源喷嘴单元和所述图案化缝隙片之间，并且包括将所述沉积源喷嘴单元和所述图案化缝隙片之间的空间分隔成多个子区域的多个阻挡板， 沉积空间，其中所述薄膜沉积设备与所述基板分离预定距离，并且所述薄膜沉积设备和所述基板可相对于彼此移动。
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公开(公告)号：US20110048320A1
公开(公告)日：2011-03-03
申请号：US12873689
申请日：2010-09-01
申请人： Young-Mook CHOI , Chang-Mog Jo , Hee-Cheol Kang , Hyun-Sook Park
发明人： Young-Mook CHOI , Chang-Mog Jo , Hee-Cheol Kang , Hyun-Sook Park
CPC分类号： C23C16/52 , C23C14/042 , C23C14/12 , C23C14/243 , H01L51/0011 , H01L51/56
摘要： A thin film deposition apparatus that forms a thin film on a substrate includes: a deposition source that discharges a deposition material; a deposition source nozzle unit that is disposed at a side of the deposition source and includes a plurality of deposition source nozzles; a patterning slit sheet that is disposed opposite to the deposition source nozzle unit and includes a plurality of patterning slits; and a blocking member that is disposed between the substrate and the deposition source, wherein the thin film deposition apparatus is separated from the substrate by a predetermined distance, the substrate is moved relative to the thin film deposition apparatus, and the blocking member is moved along with the substrate to screen at least one portion of the substrate.
摘要翻译： 在衬底上形成薄膜的薄膜沉积装置包括：放电沉积材料的沉积源; 沉积源喷嘴单元，其设置在所述沉积源的一侧并且包括多个沉积源喷嘴; 图案化缝隙片，其与所述沉积源喷嘴单元相对设置并且包括多个图案化缝隙; 以及设置在所述基板和所述沉积源之间的阻挡构件，其中所述薄膜沉积设备与所述基板分离预定距离，所述基板相对于所述薄膜沉积设备移动，并且所述阻挡构件沿着 其中所述衬底筛选所述衬底的至少一部分。
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19.发明授权公开(公告)号：US07471036B2
公开(公告)日：2008-12-30
申请号：US11389033
申请日：2006-03-27
申请人： Soon-Dong Jeong , Do-Hun Pyun , Chang-Mog Jo , Jae-Kwang Ryu
发明人： Soon-Dong Jeong , Do-Hun Pyun , Chang-Mog Jo , Jae-Kwang Ryu
摘要： A shadow mask for a cathode ray tube has an effective screen portion having a plurality of beam passage holes arranged in a predetermined pattern, and an inactive portion with no beam passage holes. The length of a beam passage hole at a column adjacent to a division between the effective screen portion and the inactive portion (hereinafter “the beam passage hole length”) in the long-sided direction is set to be smaller than the length of a beam passage hole placed at the short-sided center of the column. The beam passage hole length “a” at columns which are even-numbered from the long-sided center of the effective screen portion is set to satisfy the condition of 1>a/A≧0.45, compared to the length A of the beam passage hole placed at the short-sided center of relevant columns. The beam passage hole length “b” at columns which are odd-numbered is set to satisfy the condition of 1>b/B≧0.35, compared to the length B of the beam passage hole placed at the short-sided center of relevant columns.
摘要翻译： 用于阴极射线管的阴罩具有有效屏幕部分，其具有以预定图案布置的多个光束通过孔以及没有光束通过孔的无效部分。 与长边方向的有效屏幕部分和非活动部分之间的分界面（以下称为“光束通过孔长度”）相邻的列处的光束通过孔的长度被设定为小于光束的长度 通道孔位于柱的短边中心。 与有效屏幕部分的长边中心偶数编号的列的光束通过孔长度“a”设置为满足条件1> a / A> = 0.45，与光束的长度A相比 通孔位于相关柱的短边中心。 奇数列的光束通过孔长度“b”设定为满足条件1> b / B> = 0.35，与放置在相关的短边中心处的光束通过孔的长度B相比 列。
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公开(公告)号：US20060226755A1
公开(公告)日：2006-10-12
申请号：US11389033
申请日：2006-03-27
申请人： Soon-Dong Jeong , Do-Hun Pyun , Chang-Mog Jo , Jae-Kwang Ryu
发明人： Soon-Dong Jeong , Do-Hun Pyun , Chang-Mog Jo , Jae-Kwang Ryu
IPC分类号： H01J29/80
摘要： A shadow mask for a cathode ray tube has an effective screen portion having a plurality of beam passage holes arranged in a predetermined pattern, and an inactive portion with no beam passage holes. The length of a beam passage hole at a column adjacent to a division between the effective screen portion and the inactive portion in the long-sided direction is set to be smaller than the length of a beam passage hole placed at the short-sided center of the column. The length a of the beam passage hole adjacent to the division between the effective screen portion and the inactive portion at columns which are even-numbered from the long-sided center of the effective screen portion is established to satisfy the condition of 1>a/A≧0.45, compared to the length A of the beam passage hole placed at the short-sided center of relevant columns. The length b of the beam passage hole adjacent to the division between the effective screen portion and the inactive portion at columns which are odd-numbered from the long-sided center of the effective screen portion is established to satisfy the condition of 1>b/B≧0.35, compared to the length B of the beam passage hole placed at the short-sided center of relevant columns.
摘要翻译： 用于阴极射线管的阴罩具有有效屏幕部分，其具有以预定图案布置的多个光束通过孔以及没有光束通过孔的无效部分。 在与有效屏幕部分和非活动部分之间在长边方向上的分隔相邻的列处的光束通过孔的长度被设定为小于放置在短边中心的光束通过孔的长度 列。 建立与有效屏幕部分的长边中心偶数列的有效屏幕部分与非活动部分之间的划分相邻的光束通过孔的长度a，以满足条件1> a / 与相关柱的短边中心处的光束通过孔的长度A相比，A> = 0.45。 建立与有效屏幕部分的长边中心奇数编号的有效屏幕部分与非活动部分之间的划分相邻的光束通过孔的长度b，以满足条件1> b / 与相关柱的短边中心处的光束通过孔的长度B相比，B> 0.35。
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