VAPOR DEPOSITION APPARATUS
    12.
    发明申请
    VAPOR DEPOSITION APPARATUS 审中-公开
    蒸气沉积装置

    公开(公告)号:US20150211118A1

    公开(公告)日:2015-07-30

    申请号:US13577891

    申请日:2011-06-20

    IPC分类号: C23C16/455

    CPC分类号: C23C16/45565 C23C16/4412

    摘要: Disclosed is a vapor deposition apparatus, comprising: a reactor for housing a target substrate on which a thin film is to be formed by vapor deposition; a shower head having: a gas inlet for introducing a gas; a gas distribution space for diffusing the gas; and a shower plate having a plurality of gas channels for supplying the gas from the gas distribution space into the reactor; and a gas outlet for externally discharging the gas from the reactor, the gas distribution space of the shower head having the shower plate as a bottom face thereof, the gas distribution space having a first space located relatively far from the gas outlet of the reactor and a second space located relatively close to the gas outlet of the reactor, the first space being formed so as to be taller than the second space.

    摘要翻译: 公开了一种气相沉积设备,包括:用于容纳目标衬底的反应器,其上将通过气相沉积形成薄膜; 淋浴头,具有:用于引入气体的气体入口; 用于扩散气体的气体分配空间; 以及具有多个气体通道的喷淋板,用于将气体从气体分配空间供给到反应器中; 以及用于从反应器外部排出气体的气体出口,具有淋浴板作为其底面的喷淋头的气体分配空间,所述气体分配空间具有位于相对远离反应堆的气体出口的第一空间, 相对靠近所述反应器的气体出口定位的第二空间,所述第一空间形成为比所述第二空间高。

    Heating control system, deposition device provided therewith, and temperature control method
    13.
    发明授权
    Heating control system, deposition device provided therewith, and temperature control method 有权
    加热控制系统,提供的沉积装置和温度控制方法

    公开(公告)号:US08907254B2

    公开(公告)日:2014-12-09

    申请号:US13577109

    申请日:2011-03-29

    摘要: A heating control system which allows a plurality of heaters to heat an object without depending on a variation in characteristics among a plurality of heater power sources includes: a thermocouple which detects a temperature of an object to be heated; temperature control means that receives a target temperature and a current temperature, and carries out electric power control so that these temperatures match; electric current and voltage detecting means for detecting an electric power value and a current electric power; and target electric power calculating means that receives the electric power value, and calculates the target electric power by multiplying the electric power value by a given ratio. The temperature control means receives the target electric power and the current electric power, and carries out electric power control so that the current electric power matches the target electric power.

    摘要翻译: 一种加热控制系统,其允许多个加热器在不依赖于多个加热器电源中的特性变化的情况下加热物体,包括:热电偶,其检测待加热物体的温度; 温度控制装置,其接收目标温度和当前温度,并进行电力控制,使得这些温度匹配; 用于检测电力值和电流的电流和电压检测装置; 以及目标电力计算装置,其接收电力值,并通过将电力值乘以给定的比例来计算目标电力。 温度控制装置接收目标电力和当前电力,并且进行电力控制,使得当前电力与目标电力匹配。

    HEATING CONTROL SYSTEM, DEPOSITION DEVICE PROVIDED THEREWITH, AND TEMPERATURE CONTROL METHOD
    14.
    发明申请
    HEATING CONTROL SYSTEM, DEPOSITION DEVICE PROVIDED THEREWITH, AND TEMPERATURE CONTROL METHOD 有权
    加热控制系统,提供的沉积装置和温度控制方法

    公开(公告)号:US20130020311A1

    公开(公告)日:2013-01-24

    申请号:US13577109

    申请日:2011-03-29

    IPC分类号: H05B3/02

    摘要: In order to make a heating control system which allows a plurality of heaters to heat an object to be heated without depending on a variation in characteristics among a plurality of heater power sources, a heating control system of the present invention includes: a thermocouple (6M) which detects a temperature of an object to be heated; temperature control means (3M) and temperature control means (3S1); electric current and voltage detecting means (5M) for detecting an electric power value (Wm), and electric current and voltage detecting means (5S1) for detecting a current electric power (PVs1); and target electric power calculating means (1S1) for calculating a target electric power (SPs1). The temperature control means (3M) receives a target temperature (SPm) and a current temperature (PVm), and carries out electric power control so that the current temperature (PVm) matches the target temperature (SPm). The target electric power calculating means (1S1) receives the electric power value (Wm), and calculates the target electric power (SPs1) by multiplying the electric power value (Wm) by a given ratio. The temperature control means (3S1) receives the target electric power (SPs1) and the current electric power (PVs1), and carries out electric power control so that the current electric power (PVs1) matches the target electric power (SPs1).

    摘要翻译: 为了制造允许多个加热器不依赖于多个加热器电源之间的特性变化而加热待加热物体的加热控制系统,本发明的加热控制系统包括:热电偶(6M ),其检测待加热物体的温度; 温度控制装置(3M)和温度控制装置(3S1); 用于检测电力值(Wm)的电流和电压检测装置(5M)以及用于检测电流(PVs1)的电流和电压检测装置(5S1)。 以及用于计算目标电力(SPs1)的目标电力计算装置(1S1)。 温度控制装置(3M)接收目标温度(SPm)和当前温度(PVm),并进行电力控制,使当前温度(PVm)与目标温度(SPm)相匹配。 目标电力计算装置(1S1)接收电力值(Wm),并通过将电功率值(Wm)乘以给定的比例来计算目标电力(SPs1)。 温度控制装置(3S1)接收目标电力(SPs1)和当前电力(PVs1),进行电力控制,使得电流(PVs1)与目标电力(SPs1)一致。

    BUSINESS PROCESS CONTROL APPARATUS, BUSINESSES PROCESS CONTROL METHOD AND BUSINESS PROCESS CONTROL PROGRAM
    15.
    发明申请
    BUSINESS PROCESS CONTROL APPARATUS, BUSINESSES PROCESS CONTROL METHOD AND BUSINESS PROCESS CONTROL PROGRAM 审中-公开
    业务流程控制设备,业务流程控制方法和业务流程控制程序

    公开(公告)号:US20110113006A1

    公开(公告)日:2011-05-12

    申请号:US12736725

    申请日:2009-04-09

    IPC分类号: G06F17/30

    CPC分类号: G06Q10/06 G06Q10/10

    摘要: A business process control apparatus, a business process control method and a business process control program are provided which can properly estimate a business process. The business process control apparatus includes: business process data storage means for storing a business process data group; copying means for copying business process data contained in said business process data group and adding new business process data to said business process data group; and estimation calculating means for calculating an estimation value indicating how much said business process data is effective.

    摘要翻译: 提供了可以适当地估计业务处理的业务过程控制装置,业务过程控制方法和业务过程控制程序。 业务处理控制装置包括:业务处理数据存储装置,用于存储业务处理数据组; 复制装置,用于复制所述业务处理数据组中包含的业务处理数据,并将新的业务处理数据添加到所述业务处理数据组; 以及估计计算装置,用于计算指示所述业务处理数据有效多少的估计值。

    Image forming apparatus
    16.
    发明授权
    Image forming apparatus 有权
    图像形成装置

    公开(公告)号:US06301023B1

    公开(公告)日:2001-10-09

    申请号:US09243923

    申请日:1999-02-03

    IPC分类号: H04N104

    摘要: In an image forming apparatus including a transfer and transport belt suspended between a plurality of rollers, an image forming section for forming a pattern image on the transfer and transport belt, and a pattern image detecting sensor for detecting the pattern image, the pattern image detecting sensor is disposed so as to detect the surface of a suspended segment, of the transfer and transport belt, suspended between the rollers, and a back surface contact member that is in contact with a back surface of a detection area where the pattern image detecting sensor detects the pattern image on the surface of the transfer and transport belt is provided so as to render the detection area flat and stable. This can provide an image forming apparatus incorporating a pattern image detecting means having a simple arrangement and a capability to surely detect the pattern image in a precise and stable manner.

    摘要翻译: 在包括悬挂在多个辊子之间的转印和输送带的图像形成装置中,用于在转印和输送带上形成图案图像的图像形成部分和用于检测图案图像的图案图像检测传感器,图案图像检测 传感器被设置为检测悬挂在辊之间的传送带和传送带的悬挂部分的表面与与图案图像检测传感器的检测区域的背面接触的背面接触部件 检测传送带的表面上的图案图像,使得检测区域平坦且稳定。 这可以提供一种图像形成装置,其包括具有简单布置的图案图像检测装置和以精确和稳定的方式可靠地检测图案图像的能力。

    Image forming apparatus for correcting superimposition error
    17.
    发明授权
    Image forming apparatus for correcting superimposition error 失效
    用于校正叠加误差的图像形成装置

    公开(公告)号:US06219517B1

    公开(公告)日:2001-04-17

    申请号:US09428015

    申请日:1999-10-27

    IPC分类号: G03G1501

    摘要: A registration pattern data generating portion is configured of a pattern set data generator for rough order error estimation and a pattern set data generator for fine order error estimation. When an error is estimated, a pattern set for rough order error estimation is checked first so as to roughly determine the size of the error and then another pattern set for fine order error estimation is checked so as to finely determine the size of the error. Thus, checking the two types of pattern sets makes it possible to exactly recognize the error in rough and fine units, providing fast and exact error determination.

    摘要翻译: 注册模式数据生成部分由用于粗序错误估计的模式集数据生成器和用于精细阶错误估计的模式集数据生成器构成。 当估计出错误时,首先检查用于粗略秩错误估计的模式,以粗略地确定误差的大小,然后检查用于精细订单误差估计的另一模式集,以精确地确定误差的大小。 因此,检查两种类型的图案集可以精确地识别粗略和精细单位的误差,从而提供快速准确的误差确定。

    Voltage control apparatus for controlling a charger in an image forming
apparatus
    19.
    发明授权
    Voltage control apparatus for controlling a charger in an image forming apparatus 失效
    用于控制图像形成装置中的充电器的电压控制装置

    公开(公告)号:US5659839A

    公开(公告)日:1997-08-19

    申请号:US540884

    申请日:1995-10-11

    IPC分类号: G03G15/02

    CPC分类号: G03G15/0266

    摘要: An electrographic copying machine has a photoreceptor drum which moves so that a photosensitive layer on its surface is successively charged, exposed, developed and charge-removed. The photosensitive layer is made of an amorphous material. The drum surface is charged by a charger before a latent image is formed thereon through exposure. A voltage generator is provided which supplies the charger with a voltage to charge the drum surface. It takes time for the potential of the charged drum surface at the developing section to reach a predetermined potential from a potential higher than the predetermined potential due to a rise characteristic of the surface potential. A controller is provided which corrects an output voltage value of the voltage generator to a voltage value necessary for the drum surface to be charged at the predetermined potential in a predetermined number of charging operations performed until the surface potential reaches the predetermined potential.

    摘要翻译: 电摄影复印机具有感光鼓,其移动,使得其表面上的感光层被连续地充电,曝光,显影和电荷去除。 感光层由无定形材料制成。 在通过曝光形成潜像之前,通过充电器对鼓表面进行充电。 提供电压发生器,其为充电器提供电压以对鼓表面充电。 由于表面电位的上升特性,显影部分的带电鼓表面的电位需要时间从高于预定电位的电位达到预定电位。 提供一种控制器,其在直到表面电位达到预定电位的预定数量的充电操作中将电压发生器的输出电压值校正为在预定电位下被充电的鼓表面所需的电压值。

    Toner feeding device capable of signalling need to replenish toner
    20.
    发明授权
    Toner feeding device capable of signalling need to replenish toner 失效
    能够发出信号的调色剂进料装置需要补充墨粉

    公开(公告)号:US5257076A

    公开(公告)日:1993-10-26

    申请号:US885377

    申请日:1992-05-19

    IPC分类号: G03G15/08 G03G21/00

    摘要: A toner conveyor disposed in a housing includes an upstream-side toner conveyor and a downstream-side toner conveyor. A toner amount detector is disposed to detect whether the amount of toner in the downstream portion of the housing is greater than a predetermined amount or not, and the upstream-side toner conveyor is not operated when the amount of toner is greater than the predetermined amount in the downstream portion of the housing. A toner replenishment signal is produced when the amount of toner is not greater than the predetermined amount in the downstream portion of the housing despite the downstream-side toner conveying means being operated for more than a predetermined period of time. The toner amount detector can be a plate which rests on top of the toner and pivots up and down as the toner level changes, with a magnet on the plate detected by a suitable detector. Alternatively, the toner amount detector can be a member which moves up and down on top of the toner as the toner level changes, and a photodetector which is activated when the member is at a low level.