公开(公告)号：US08040529B2

公开(公告)日：2011-10-18

申请号：US12712475

申请日：2010-02-25

Applicant: Takahiro Okuda ,  Takahiro Suga ,  Hiroaki Takimasa ,  Shinsuke Yamakawa

Inventor： Takahiro Okuda ,  Takahiro Suga ,  Hiroaki Takimasa ,  Shinsuke Yamakawa

IPC: G01B11/14

CPC classification number: G01B11/03 ,  G02B13/22

Abstract: A focused image is taken around the focal point by a confocal displacement meter. In a measurement apparatus, a confocal displacement meter system OPT-A includes a laser diode 1, a collimator lens 4, an objective lens 6, a half mirror 3, a diaphragm plate 31, and a photodiode 2. An observation image imaging system OPT-B is a telecentric light receiving optical system, and the observation image imaging system OPT-B includes a white light source 94, an objective lens 6, a dichroic mirror 5, a diaphragm plate 81, an image formation lens 82, and an image sensor 9. The collimator lens 4 is swept by an oscillator 7 in a two-headed arrow direction. A diameter of a diaphragm hole of the diaphragm plate 81 is set such that a depth of field of the objective lens 6 is not lower than sweep amplitude of the collimator lens 4.

Abstract translation: 通过共焦位移仪在焦点周围拍摄聚焦图像。 在测量装置中，共焦位移计系统OPT-A包括激光二极管1，准直透镜4，物镜6，半反射镜3，光阑板31和光电二极管2.观察图像成像系统OPT -B是远心光接收光学系统，观察图像成像系统OPT-B包括白色光源94，物镜6，二向色镜5，光阑板81，成像透镜82和图像 传感器9.准直透镜4以双向箭头方向由振荡器7扫描。 隔膜板81的隔膜孔的直径被设定为使得物镜6的景深不低于准直透镜4的扫描幅度。

公开(公告)号：US20100265519A1

公开(公告)日：2010-10-21

申请号：US12712012

申请日：2010-02-24

Applicant: Hiroaki TAKIMASA ,  Takahiro Suga ,  Yoshihiro Yamashita

Inventor： Hiroaki TAKIMASA ,  Takahiro Suga ,  Yoshihiro Yamashita

IPC: G01B11/14

CPC classification number: G01B11/0608 ,  G02B27/0911 ,  G02B27/0955

Abstract: A displacement is accurately measured at high speed to a measurement object having various surface states. In a displacement sensor including a confocal optical system in which an objective lens is moved along an optical axis, light emitted from a laser diode is formed into a slit beam by a cylindrical lens, a Y-axis side orthogonal to the optical axis is narrowed such that the light is collected on a surface of a measurement object, and an X-axis orthogonal to the optical axis is elongated in order to average a component of the light reflected from the surface. A photodiode receives the light reflected from the surface of the measurement object through an opening disposed in a position of conjugation with the laser diode. The opening is formed into a slit shape that is short in the Y-axis while being long in the X-axis. The displacement of the surface is measured from a position of the objective lens when a light receiving signal becomes the maximum.

Abstract translation: 高精度地测量到具有各种表面状态的测量对象。 在包括物镜沿着光轴移动的共焦光学系统的位移传感器中，从激光二极管发出的光通过柱面透镜形成为狭缝光束，与光轴正交的Y轴侧变窄 使得光被收集在测量对象的表面上，并且与光轴正交的X轴被拉长以便平均从表面反射的光的分量。 光电二极管通过设置在与激光二极管共轭的位置的开口接收从测量对象表面反射的光。 该开口形成为在X轴上长而在Y轴上短的狭缝形状。 当光接收信号变为最大值时，从物镜的位置测量表面的位移。

公开(公告)号：US06995849B2

公开(公告)日：2006-02-07

申请号：US10366687

申请日：2003-02-14

Applicant: Tetsuya Uno ,  Hiroaki Takimasa ,  Takahiro Suga

Inventor： Tetsuya Uno ,  Hiroaki Takimasa ,  Takahiro Suga

IPC: G01B11/24

CPC classification number: G01B11/026

Abstract: A displacement sensor is provided with: a light-projection unit; a light-receiving unit having a light-shielding mask and a light-receiving element; a first light-converging element which converges luminous fluxes released from the light-projection unit on a measuring object; a second light-converging element which converges reflected luminous fluxes on the light-receiving unit; a first light-path control element which allows a projection-light light axis and a receiving-light light axis to be coaxially set on the measuring object side; and a light-path length sweeping mechanism which continuously changes a light-path length from the light-projection unit to the measuring object and a light-path length from the measuring object to the light-receiving unit.