公开(公告)号：US06368051B2

公开(公告)日：2002-04-09

申请号：US09739948

申请日：2000-12-18

申请人： Ivo J. Raaijmakers

发明人： Ivo J. Raaijmakers

IPC分类号： B65G4907

CPC分类号： C23C14/568 ,  C23C14/566 ,  H01L21/67745 ,  Y10S414/136 ,  Y10S414/137 ,  Y10S414/139

摘要： A machine for manufacturing semiconductor devices has a processing chamber for processing the semiconductor wafer. A transfer chamber has at least two positions, one position to facilitate the transfer of a wafer to be processed into the transfer chamber and to facilitate the transfer of a processed wafer from the transfer chamber to the cassette from which the wafer originated. The second position facilitates the transfer of a wafer to and from the processing chamber. A transfer arm simultaneously transfers an unprocessed wafer from the first position to the second position with the transfer of a processed wafer from the second position to the first position.

公开(公告)号：US6039074A

公开(公告)日：2000-03-21

申请号：US926496

申请日：1997-09-09

申请人： Ivo J. Raaijmakers ,  Chris W. Burkhart ,  David Christensen ,  Michael N. Susoeff

发明人： Ivo J. Raaijmakers ,  Chris W. Burkhart ,  David Christensen ,  Michael N. Susoeff

IPC分类号： F16K7/16 ,  F16K11/20 ,  F16K31/122 ,  F16K15/18

CPC分类号： F16K31/1221 ,  F16K11/207 ,  F16K7/16

摘要： A pressure-induced shut-off valve for a liquid delivery system with a back pressure regulator having a positive shut-off capability is provided. The pressure-induced shut-off valve may incorporate an integrated purge valve or an integrated cross flow nebulizer/vaporizer. The pressure-induced shut-off valve functions as a variable flow restrictor which automatically adjusts itself to provide a constant back pressure in the liquid line.

摘要翻译： 提供了一种用于具有正切断能力的背压调节器的液体输送系统的压力截止阀。 压力导致的截止阀可以包括集成的净化阀或集成的交叉流雾化器/蒸发器。 压力导致的截止阀用作可变流量限制器，其自动调节自身以在液体管线中提供恒定的背压。