System and method for reducing deionized water consumption
    11.
    发明申请
    System and method for reducing deionized water consumption 有权
    减少去离子水消耗的系统和方法

    公开(公告)号:US20060054566A1

    公开(公告)日:2006-03-16

    申请号:US10940249

    申请日:2004-09-13

    IPC分类号: C02F1/00

    摘要: A system and method are provided for reducing DI water consumption by delivering the DI water at an elevated processing temperature when demanded. The DI water is passed through a heater for heating the DI water to a processing temperature in a single pass. The DI water is circulated through a recirculation loop, including the heater, until demanded. The DI water is monitored for contaminants and bubbles or voids. Detected contaminants or voids are discharged through vents of the system. Turbulence or biocides can be introduced into the recirculated DI water for inhibiting biological contamination.

    摘要翻译: 提供了一种系统和方法,用于通过在需要时在升高的处理温度下输送去离子水来减少去离子水消耗。 去离子水通过加热器,将去离子水加热至单程中的加工温度。 去离子水循环通过循环回路,包括加热器,直到需要。 监测去离子水的污染物和气泡或空隙。 检测到的污染物或空隙通过系统的通风口排出。 可将湍流或杀生物剂引入再循环的去离子水中以抑制生物污染。